Process Pump

P U Panel mount union Union Ordering Example Tubing size 12 x 10 PAF3410S-1S13-B Process pump OUT side SMC LQ1E41-SN Union elbow LQ1U4B-SN Union PAF3410S-1S13-B 1 IN side SMC LQ1E41-SN (Union elbow) 1 LQ1U4B-SN (Union) 1 Tubing size 3/8" x 1/4" Note) Fittings which are ordered with the process pump at the same time will be shipped in a separate package. 600 Process Pump Automatically Operated

25

P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-SN Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-SN (Union elbow) 1 LQ1E21-SN Union elbow LQ1U22-SN (Union) 1 Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

Fluoropolymer Piping Equipment

Metric size Inch size Series 1/8" 1/4" 3/8" 1/2" 3/4" 1" 11/4" Appearance Class 6 8 10 12 19 25 4 3 2 3 4 5 6 7 Straight adapter LQ3A P.933 2 3 4 5 6 Union flange LQ3F P.935 2 3 4 5 6 2 3 4 5 6 2 3 4 5 6 2 3 4 5 6 Space saving type union elbow LQ3E-SN P.936 Space saving type union tee LQ3T-SN P.936 Space saving type panel mount union LQ3P-SN P.936 Space saving type union LQ3U-SN P.936 1 2

Smooth Cylinder/Low Speed Cylinder

SN-020B SN-032B SN-040B Material: Carbon steel 26 30 25.5 M20 x 1.5 8 32 37 31.5 M26 x 1.5 8 41 47.3 40.5 M32 x 2.0 10 1 Trunnion Nut Applicable retaining ring part no. (mm) Applicable bore size (mm) 20, 25 32, 40 Dd9 d L L1 m t Part no.

Clean Regulator/Fluororesin Type

AP100 Ordering example Tubing size 1/4" x 5/32" SRF10S-1S1107 Tubing size 4 x 3 SRF10S-1S1107 1 LQ1E3B-SN (Union elbow) 1 IN side OUT side SMC SMC LQ1T22-SN (Union tee) 1 LQ1E3B-SN (Union elbow) Note) For shipment, the regulator and fittings are individually packaged and dispatched together in 1 box.

ZP

Replacement Parts/Mounting Nut How to Order Dimensions d ZPNA M16 Mounting thread (mm) Model A 19 SN-015A d M14 x 1 22 ZPNA-M16 25.4 M16 x 1.5 B 21.9 H 5 6 9 8 M22 x 1.5 M16 M16 x 1.5 B M18 M18 x 1.5 M22 M22 x 1.5 27 ZPNA-M18 31.2 M18 x 1.5 Mounting nut part number for M14 x 1 is SN-015A.

PF2D

Order example Tubing size 1/4" x 5/32" Tubing size 1/4" x 5/32" PFM PF2D504S-11-1-1S11 PFMB PFMC IN side OUT side SMC SMC PFMV PF2D504S-11-1-1S11 1 LQ1E3B-SN (Union elbow) PF2A LQ1T3B-SN (Union tee) LQ1E3B-SN (Union elbow) 1 PF3W LQ1T3B-SN (Union tee) 1 LFE Note) Flow sensors and fittings are shipped packed separately.

ZP

Replacement Parts/Mounting Nut How to Order Dimensions d ZPNA M16 Mounting thread (mm) Model A 19 SN-015A d M14 x 1 22 ZPNA-M16 25.4 M16 x 1.5 B 21.9 H 5 6 9 8 M22 x 1.5 M16 M16 x 1.5 B M18 M18 x 1.5 M22 M22 x 1.5 27 ZPNA-M18 31.2 M18 x 1.5 Mounting nut part number for M14 x 1 is SN-015A.

ZP

Replacement Parts/Mounting Nut How to Order Dimensions d ZPNA M16 Mounting thread (mm) Model A 19 SN-015A d M14 x 1 22 ZPNA-M16 25.4 M16 x 1.5 B 21.9 H 5 6 9 8 M22 x 1.5 M16 M16 x 1.5 B M18 M18 x 1.5 M22 M22 x 1.5 27 ZPNA-M18 31.2 M18 x 1.5 Mounting nut part number for M14 x 1 is SN-015A.

ZP

Replacement Parts/Mounting Nut How to Order Dimensions d ZPNA M16 Mounting thread (mm) Model A 19 SN-015A d M14 x 1 22 ZPNA-M16 25.4 M16 x 1.5 B 21.9 H 5 6 9 8 M22 x 1.5 M16 M16 x 1.5 B M18 M18 x 1.5 M22 M22 x 1.5 27 ZPNA-M18 31.2 M18 x 1.5 Mounting nut part number for M14 x 1 is SN-015A.

Size: 4 (1/2 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 04 (1/2), Option: N (Nickel Plated)

Size: 4 (1/2 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 04 (1/2), Option: S (Sealant)

Size: 4 (1/2 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 04 (1/2), Option: None, Lock Nut: J (Round)

Body Size: 4 (1/2 Basis), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 04 (1/2), Sealant: None

Body Size: 4 (1/2 Basis), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 04 (1/2), Sealant: S (Sealant)

Body Size: 4 (1/2 Basis), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 04 (1/2), Sealant: None

Body Size: 4 (1/2 Basis), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 04 (1/2), Sealant: S (Sealant)

Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/2, Option: None, Types of Screw

Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/2, Option: Electroless Nickel-Plated

Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 1/2, Option: With Seal, Types