VFS

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components VS4 System Solenoid valve Speed controller Silencer Tube bore x Length VQ7 Series VFS2000 AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) A T0604 x 1 m 1 8 Rc EVS Series VFS2000 AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) VFN B T1075 x 1 m 1 4 Rc Double Check Spacer/Specifications Can hold an intermediate cylinder

CC

Instead, use an individual CC valve unit or a speed controller (AS2000, AS3000, AS4000, etc.) through a pipe connection. 5 to 50C Ambient and fluid temperature Turbine oil (40 to 100 mm2/s) Fluid 40 mm Nominal size Converter Standard Effective Oil Level Stroke/Effective Volume Standard effective oil level stroke (mm) 50 100 150 200 300 Effective volume (cm3) 60 120 180 250 370 Limited flow

F

D I M E N S I O N S S E R I E S (N)AS1000-M3 1.5MPa / 220PSI Proof Pressure 1MPa / 145PSI Max Operating Pressure 0.05MPa / 8PSI Min Operating Pressure 5 ~ 60OC / 40 ~ 140F Ambient and Fluid Temperature 8 ~ 10Turns No Of Needle Rotations AS1000 Not Applicable Panel Cut Out Dimensions AS2000 16.5 AS3000 16.5 AS4000 25 D I M E N S I O N S S E R I E S (N)AS1000-M5 D I M E N S I O N S S E R I

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Solenoid valve Speed controller Silencer Tube bore x Length Series VFS2000 AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) A T0604 x 1 m 1 8 Rc Series VFS2000 AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) T1075 x 1 m B 1 4 Rc Double Check Spacer/Specifications Specifications Check Valve Operating Can hold an intermediate cylinder

Air-hydro Unit

Instead, use an individual CC valve unit or a speed controller (AS2000, AS3000, AS4000, etc.) through a pipe connection.

CC

Instead, use an individual CC valve unit or a speed controller (AS2000, AS3000, AS4000, etc.) through a pipe connection. 5 to 50C Ambient and fluid temperature Turbine oil (40 to 100 mm2/s) Fluid 40 mm Nominal size Converter Standard Effective Oil Level Stroke/Effective Volume Standard effective oil level stroke (mm) 50 100 150 200 300 Effective volume (cm3) 60 120 180 250 370 Limited flow

2-Color Display Digital Flow Switch Series PFM

DIN Rail Mounting Bracket (Order Separately) ZS 33 R Stations 1 2 3 4 5 1 station 2 stations 3 stations 4 stations 5 stations DIN rail (supplied by customers) Port size F02: G1/4 cannot be mounted on the DIN rail. 919 Series PFM5 Specifications Model PFM510 PFM525 PFM550 PFM511 Dry air, N2, Ar, CO2 (Air quality grade is JIS B8392.1-1, 1.2 to 1.6.2 and ISO8573.1-1, 1.2 to 1.6.2.)

0.01

C08 C10 C12 02 N02 F02 C04 C06 C08 02 N02 F02 C08 C10 C12 02 N02 F02 C04 C06 C08 02 N02 F02 IN port size IN port size Construction The construction and materials are the same as the standard product. Refer to Construction on page 323. The symbol stands for unavailable combination. The symbol stands for unavailable combination.

PFxx-OMJ0005CN

LED UP) (DOWN) (OUT2) (OUT1) SET) (OUT ) (IN ) (OUT1) OUT1 ON (OUT2) OUT2 ON (SET) INOUT LED (OUT1)/ (UP) ON/OFF (DOWN) ON/OFF DIN -13No.PF-OMJ0005CN-I BAA B BAC 13.2 mm (71) C A A B -14No.PF-OMJ0005CN-I 0.50.05 Nm (ZS-33-M) (ZS-33-MS) M34 1.2 mm (71) DINZS-33-R DIN DIN0.40.05 Nm DIN DIN F02(G1/4)DIN DIN -15No.PF-OMJ0005CN-I () () Rc(NPT)1/8 79 Nm Rc(NPT)1/4 1214

Tamper Proof and Flat Head Screw

40.7 18 1.5 36.7 AS22 0-N02-ST NPT 1/4 17.5 NPT 1/4 AS32 0-02-ST Rc 1/4 19 22.5 R 1/4 AS32 0-F02-ST PF 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 AS32 0-N02-ST NPT 1/4 NPT 1/4 AS32 0-03-ST Rc 3/8 19 22.5 R 3/8 AS32 0-F03-ST PF 3/8 24.3 9.5 30 53.7 20.8 1.5 47.7 AS32 0-N03-ST NPT 3/8 NPT 3/8 AS42 0-04-ST Rc 1/2 24 27.5 R 1/2 AS42 0-F04-ST PF 1/2 28.5 12 38.5 63.8 26.7 1.5 55.8 AS42 0-N04-ST NPT 1

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

Table of Contents

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

2-Color Display Digital Pressure Switch Series ISE70/75/75H

1 Brown DC (+) 46 60 (31) (38.7) 3.5 35 OUT2 (NPN or PNP) 2 White 3 Blue DC () 24 OUT1 (NPN or PNP) 4 Black Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 6 726 Series ISE70/75/75H Specific Product Precautions 1 Be sure to read before handling.

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

DIN rail is not suitable for port size F02 (G1/4).

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

C01 A2 B2 2 49.6 (N02: 50.1) M5 x 0.8 thread depth 5 30 26.2 20 8.45 20 30 Width across flats 17 10 2 x M3 x 0.5 thread depth 4 Piping port 02: R1/4 N02: NPT1/4 3.5 8.8 Atmospheric vent port 2.6 14.7 25.1 46.2 2 12.4 26.2 10.1 8.45 22 14.5 Piping port Rc1/8 Piping port G1/4 -F02: G1/4 -C01: Rc1/8 27.7 21.7 8.45 8.45 Piping port TSJ1/4 Piping port URJ1/4 -B2: TSJ1/4 -A2: URJ1/4 736 Series

PSxx-OMM0002CN

) * (14 ) FG (49 N () () TSJSwagelok(Swagelok URJ Swagelok(VCR)/GroundGround Swagelok,VCRSwagelok Company -6No.PS-OMM0002CN-F * 6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02

Digital Flow Switch (Remote type sensor unit)

(at 500 VDC) between terminals and case Standards CE/UKCA marked, UL (CSA) -21No.PF-OMJ0016-J Specifications of piping port Model 01 02 N01 N02 F01 F02 C4 C6 C8 N7 4 8 6 1/4 (5/32") (5/16") Thread type (Port size) Rc Rc NPT NPT G G OneOneOneOne1/8 1/4 1/8 1/4 1/8 1/4 touch fitting touch fitting touch fitting touch fitting Straight without flow adjustment valve 95 g 125 g 55 g Bottom entry