Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS Inlet air temperature C Model IDFS6E IDFS8E IDFS11E 740 35 1200 1650 Air flow capacity l/mim(ANR) 614 (640) 996 (850) 1370 (1300) 40 35 160 285 230 Power consumption W 170 (259) 240 (292) 295 (337) 40 ( ): Previous model IDF6D/8D/11D

Table of Contents

(430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS HA Inlet air temperature C Model IDFS6E IDFS8E IDFS11E AT 740 35 1200 1650 Air flow capacity l/mim(ANR) 614 (640) 996 (850) 1370 (1300) ID 40 35 160 285 230 Power consumption W AMG 170 (259) 240 (292) 295 (337) 40 AFF ( ): Previous model IDF6D/8D/11D

IDUS/IDFS

(430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS HA Inlet air temperature C Model IDFS6E IDFS8E IDFS11E AT 740 35 1200 1650 Air flow capacity l/mim(ANR) 614 (640) 996 (850) 1370 (1300) ID 40 35 160 285 230 Power consumption W AMG 170 (259) 240 (292) 295 (337) 40 AFF ( ): Previous model IDF6D/8D/11D

REA_EN

Type Type Elbow type straight type In-line type REA25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REA32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REA40 AS2201F-02-06-X214 AS2301F-02-06-X214 AS2001F-06-X214 REA50 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 REA63 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 Table.

Related Products: Holder Series TMH 1

Note) 4 6 8 10 12 23 04 06 08 10 12 3.2 TMH-23J TMH-04J TMH-06J ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F AK TMH-06 TMH-08 ASS TMH-10 TMH-12 Applicable tubing Inch Size ASR Note) Mounting bracket is not available. This is an application example. Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Note) 2 position single, 4/2 5/3 (A/B R1/R2) Conditions Base mounted Series CJ2 Series CM2 Series MB/CA1 TO604 x 1 m Tube x Length SQ1000 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m Speed controller AS4001F-10 AS3001F-06 SQ2000 Silencer AN200-02 2-3-1 2 Series SQ1000/2000 Precautions

SYJ3000/5000/7000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

REA/REB

MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Related Products: Holder Series TMH 1

Note) 4 6 8 10 12 23 04 06 08 10 12 3.2 TMH-23J TMH-04J TMH-06J ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F AK TMH-06 TMH-08 ASS TMH-10 TMH-12 Applicable tubing Inch Size ASR Note) Mounting bracket is not available. This is an application example. Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.

Metal Seal/Rubber Seal Series VQ Body Ported

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

0.4

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 Series MB, CA2 Series Conditions Tube bore x Length T0604 (O.D. 6/I.D. 4) x 1 m VQ1101 Speed controller AS3001F-06 Silencer AN200-KM8 Tube bore x Length T0806 (O.D. 8/I.D. 6) x 1 m VQ2101 Speed controller AS3001F-08 Silencer AN200-KM10 5 I N D E X F kit P kit J kit G kit T kit L kit S kit M kit Construction

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

ASN Flow Rate and Sonic Conductance AQ ASV AS1001F AS3001F AS2051F AS4001F AS2001F Model Metric size 6 6 8 6 8 10 12 4 10, 12 3.2, 4, 6 Tubing O.D.

Base Mounted Metal Seal/Rubber Seal Series VQ

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 Series MB, CA1 Series Conditions Tube bore x Length Speed controller Silencer Tube bore x Length Speed controller Silencer Tube bore x Length Speed controller Silencer T0425 x 1 m AS2001F-04 AN103-X233 VQ0151 T0604 x 1 m VQ1101 AS3001F-06 AN103-X233 T0806 x 1 m AS3001F-08 VQ2101 AN200-KM8 2-4-119

4/5 Port Solenoid Valve

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

0.4

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series Conditions Series CJ2 Series CM2 Series MB, CA2 T0604 (O.D. 6/I.D. 4) x 1 m Tube x Length VQC1101 Speed controller AS3001F-06 AN200-KM8 Silencer T0806 (O.D. 8/I.D. 6) x 1 m Tube x Length VQC2101 Speed controller AS3001F-08 AN200-KM10 Silencer 3 I N D E X Construction M kit L kit T kit P kit F kit S kit Exploded View

High Power Cylinder Series RHC

1-C 10 SYJ5000 (4.5) SYJ7000 (12.6) Composed effective area So (mm2) =0.7 VQZ1000 (3.6) VQZ2000 (12.6) VQZ3000 (16.2) Metal elbow type 2-A VQZ1000 (6.3) VQZ2000 (12.6) VQZ3000 (21.6) VFR2000 (16.2) VFR3000 (41.4) VFR4000 (67.0) 0.5 0.1 0.3 In-line type VFS1000 (9.0) VFS2000 (18.0) VFS3000 (36.0) VFS4000 (64.5) 2-B 5 AS221F (3.5) AS231F (3.5) AS2051F (4.5) AS220 (2.9) AS2000 (3.8) AS3001F

Sine Rodless Cylinder Series REA/REB

Table (3) Recommended Speed Controller Bore size (mm) Model Elbow type Straight type In-line type AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 10 15 20 25 32 40 50 63 Caution AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 1.

High Power Cylinder Series RHC

(6.5) AS3000, AS3500 (12.3) AS4001F (16) AS3000, AS3500 (12.3) AS4001F (16) AS3000, AS3500 (12.3) AS4001F (16) AS3000, AS3500 (12.3) AS4001F (16) AS3000, AS3500 (12.3) AS2051F (4.5) AS3000, AS3500 (12.3) AS3001F (10) AS3000, AS3500 (12.3) AS4001F (16) AS3000, AS3500 (12.3) AS4001F (16) AS4000 (25.5) AS4000 (25.5) AS4000 (25.5) AS321F (10) AS331F (10) AS4001F (16) AS320 (13) AS3000, AS3500

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with