Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

KP/KPQ/KPG

Q 01 Applicable fitting size Port size/Applicable tubing O.D. 04 06 08 10 12 Clean One-touch fittings 4 6 8 10 12 M5 M5 x 0.8 Thread connection Tubing (rod) connection Specifications 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 K Symbol Q G Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel 304 M Plug Same dia. tubing H Different dia. tubing

V100

Ordering Example: VV307-01-052-01-F1 pc. (5 station manifolds base) V0307-1G4 pcs. DXT060-51-13A 1 pc.

0.4

Note 2) Specify wiring type of each station on the manifold In the case of the 16-output SI unit Symbol 01 Stations Note 1 station specification sheet. Double wiring Note 1) 08 01 8 stations 1 station Specified layout Note 2) (Available up to 16 solenoids) Note 1) Indicate the sizes on the manifold specification sheet in the case of CM.

Base Mounted Metal Seal/Rubber Seal Series VQ

Note 1) 1 station 01 16 stations Note) Number of terminals 16 Note 2) Refer to page 2-4216 for details.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-08 AS2200-01 SV 200 SYJ 100 70% 50% 30% 10% SZ 0 400 MB 40 VP4 300 AS2201F -02-08 AS2200-02 S0700 200 VQ 100 VQ4 0 SV200 ANA1 -C10 T0806 VQ5 400 MB 50 300 VQC AS3201F -02-08 AS3000-02 200 VQZ 100 SQ 0 VFS MB 63 400 VFR 300 VQ7 AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components

0.4

F Manifold mounting AXT100 03 kit Nil E DIN rail mounting style Direct mounting style Wiring Stations Note) Note) S D Single wiring Double wiring SSQ2000 PR 3 C10 01 For 1 station P PL26: 01 to 12 (P kit, 26P) PL20: 01 to 09 (P kit, 20P) JL20: 01 to 08 (J kit, 20P) Port size kit 24 For 12 stations Option C8 C10 N9 N11 One-touch fitting for 8 One-touch fitting

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

Speed Controller with One-touch Fitting

-23(S)A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2

SQ1000/2000

rail mount type Direct mount type Nil E Wiring Stations Note) S D Single wiring Double wiring SSQ2000 PR 4 C10 Note) PL26: 01 to 12 (P kit, 26P) PL20: 01 to 09 (P kit, 20P) JL20: 01 to 08 (J kit, 20P) 01 1 station Bore size Option 12 12 stations C8 C10 N9 N11 8 One-touch fitting 10 One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting

KR

(mm) Weight (g) (1) D Applicable tubing KGH04-M5 KGH04-01 4 M5 x 0.8 4 2.4 9 16 4 1 4 KGH04-02 19.5 13.5 14 4 8 17 22 8 14 13 4 1 8 10 16 18 5.6 M5 x 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 4 10 12 14 18.5 22.5 23 10 15 18.5 17 1 8 1 4 6 13.1 10.4 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 Connection thread 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 28

Flow Control Equipment

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

SX

SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB

Series KP/KPQ/KPG

Q 01 Applicable fitting size Port size/Applicable tubing O.D. 04 06 08 10 12 Clean One-touch fitting 4 6 8 10 12 M5 M5 x 0.8 Specifications Thread connection Tubing (rod) connection 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Symbol Q G Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel (SUS304) Plug Same dia. tubing 4 Different dia. tubing

Series KP/KPQ/KPG

Q 01 Applicable fitting size Port size/Applicable tubing O.D. 04 06 08 10 12 Clean One-touch fitting 4 6 8 10 12 M5 M5 x 0.8 Specifications Thread connection Tubing (rod) connection 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Symbol Q G Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel (SUS304) Plug Same dia. tubing 4 Different dia. tubing

KP/KPQ/KPG

Q 01 Applicable fitting size Port size/Applicable tubing O.D. 04 06 08 10 12 Clean One-touch fitting 4 6 8 10 12 M5 M5 x 0.8 Thread connection Tubing (rod) connection Specifications 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Symbol Q G Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel (SUS304) Plug Same dia. tubing Different dia. tubing (plug-in

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Q 01 Applicable fitting size Port size/Applicable tubing O.D. 04 06 08 10 12 Clean One-touch fitting 4 6 8 10 12 M5 M5 x 0.8 Specifications Thread connection Tubing (rod) connection 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Symbol Q G Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel (SUS304) Plug Same dia. tubing 4 Different dia. tubing