Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 12.3 22.1 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02 AS331F-N02

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.

Stainless Steel 316 Fittings

KFG2H0122-N01 KFG2H0122-N02 KFG2H0325-N01 KFG2H0325-N02 KFG2H0704-N01 KFG2H0704-N02 KFG2H0906-N01 KFG2H0906-N02 KFG2H0906-N03 KFG2H1163-N02 KFG2H1163-N03 KFG2H1163-N04 KFG2H1395-N02 KFG2H1395-N03 KFG2H1395-N04 O.D. 19.4 23.8 19.4 23.8 21.1 25.5 23.3 26.7 28.3 29.7 30.3 33.5 31.5 31.9 35.1 16.2 19.4 16.2 19.4 17.9 21.1 20.1 22.3 23.6 25.3 25.6 27.1 27.1 27.2 28.7 1/8 1/4 1/8 1/4 1/8 1/4 1/

High-Precision Digital Pressure Switch

1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-07ST ASD430F-N02-09ST ASD430F-N02-11ST ASD530F-N02-07ST ASD530F-N02-09ST ASD530F-N02-11ST ASD530F-N03-07ST ASD530F-N03-09ST ASD530F-N03-11ST ASD630F-N04-11ST 8.4 9.3 11.4 12 11.6 13.2 15.2 13.2 15.2 18.5 13.2 15.2 18.5 13.2 15.2 18.5 18.5 12.9 17.5 29.4 10-32 UNF 7.8 27.4 0.7 31 30.7 11.7 4.5 10 9.6 8 16.5 13.5 16.5 17 18.5 17 18.5 21 17 18.5 21 17 18.5 21 21 23.3 20.7 23.9 25.6 28.2 25.6

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-07S 13.2 25.6 18 15 36.7 35.4 34.6 29.6 17.5 18.5 41.7 40.4 11 18.5 46.5 5/16" ASD430FG-N02-09S 15.2 28.2 NPT 1/4 21 19.7 49.3 3/8" ASD430FG-N02-11S 18.5 31 17 48.7 1/4" ASD530FG-N02-07S 13.2 25.6 20.3 41.9 43.8 43 38 19 18.5 46.9 48.8 15.4 23 51.3 5/16" ASD530FG-N02-09S 15.2 28.2 19.8 NPT 1/4 21 23.1 54.1 3/8" ASD530FG-N02-11S 18.5 32.6 17 48.7 1/4" ASD530FG-N03-07S 13.2 25.6 20.3 41.9

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KFG2H0122-N01 KFG2H0122-N02 KFG2H0325-N01 KFG2H0325-N02 KFG2H0704-N01 KFG2H0704-N02 KFG2H0906-N01 KFG2H0906-N02 KFG2H0906-N03 KFG2H1163-N02 KFG2H1163-N03 KFG2H1163-N04 KFG2H1395-N02 KFG2H1395-N03 KFG2H1395-N04 KQ2 16.2 19.4 16.2 19.4 17.9 21.1 20.1 22.3 23.6 25.3 25.6 27.1 27.1 27.2 28.7 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 12 14 12 14 12 14 19.4 23.8 19.4 23.8 21.1

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Lights up when it is turned ON. kgf/cm2 bar PSI inHg mmHg OUT1 OUT2 CH Channel display 1 2 3 4 P R E S S U R E Displays the selected channel. UP button Use this button to change the mode or set value. SET DOWN button SET button Use this button to change the mode or set value. ZSE ISE Use this button to set the mode or set value.

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

2-Color Display Digital Pressure Switch Series ISE70/75/75H

1 Brown DC (+) 46 60 (31) (38.7) 3.5 35 OUT2 (NPN or PNP) 2 White 3 Blue DC () 24 OUT1 (NPN or PNP) 4 Black Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 6 726 Series ISE70/75/75H Specific Product Precautions 1 Be sure to read before handling.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Body Ported Type Vacuum Ejector ZH Series

11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch Screw-in One-touch N02 N03 N03 Screw-in Screw-in Screw-in ZH18DA10 12 12 One-touch One-touch One-touch 10 03 12 One-touch

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NS Edition C OAdded the KK130 series S coupler and one-touch fitting type. ONumber of pages from 16 to 12.