Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

AS1201F-M5, AS1211F-M5 AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 80 60 40 20 0 0 2 4 6 8 Number of needle rotations Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 AS3201F, AS3211F AS3301F, AS3311F AS4201F, AS4211F AS4301F, AS4311F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

AS

AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 AS3201F, AS3211F AS3301F, AS3311F AS4201F, AS4211F AS4301F, AS4311F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations 485

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Bore size With One-touch fitting U01 U02 U03 U04 1 8 1 4 3 8 1 2 Needle Valve/Flow Characteristics AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations AS3201F, AS3211F

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Bore size With One-touch fitting U01 U02 U03 U04 1 8 1 4 3 8 1 2 Needle Valve/Flow Characteristics AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations AS3201F, AS3211F

AS

AS1201F-M5, AS1211F-M5 AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 80 60 40 20 0 0 2 4 6 8 Number of needle rotations Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (

Flame Resistant

With One-touch fitting Port size 01 1/8 02 1/4 03 3/8 04 1/2 Thread type G G thread 1 Flame Resistant (Equivalent to UL-94 Standard V-0) Flat Head Screwdriver Adjustable Speed Controller with One-touch Fitting AS21F-W2D Series Needle Valve/Flow Rate Characteristics Construction AS2201F-G01, AS2211F-G01 AS2201F-G02, AS2211F-G02 e t w u Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa o !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is

HANDLE, AS2201F-02-A, AS2301F-02-A, FLOW CONTROL, SVD, 0.60000 lb

CQS

Bore (mm) Stroke range (mm) 5ST L C I N OB M D K OA Q E RA H RB T 10ST 5ST 10ST 5ST 10ST 5ST 10ST 5ST 10ST 12 16 20 25 M3 X 0.5 M4 X 0.7 M5 X 0.8 M6 X 1.0 15.5 20 25.5 28 M4 X 0.7 M4 X 0.7 M6 X 1.0 M6 X 1.0 30.5 30.5 34 37.5 40.5 40.5 44 47.5 22 22 24.5 27.5 27 27 29.5 32.5 35.5 35.5 44 47.5 45.5 45.5 54 57.5 27 27 34.5 37.5 32 32 39.5 42.5 8.5 8.5 9.5 10 13.5 13.5 14.5 15 6 8 7 12 32 38

CQS

Rod end male thread 20, 25 Rod end nut Rod End Male Thread L1 Bore size (mm) C1 H1 X 5 ST 10 ST 12 16 20 25 10.5 12 14 17.5 9 10 12 15 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 19 20.5 23.5 27.5 24 25.5 28.5 32.5 Basic Style A B A B Without auto switch With auto switch Bore size (mm) Stroke range (mm) 5ST L C I M OB N D K Q OA E RA H RB T 5ST 10ST 5ST 10ST 5ST 10ST 5ST 10ST 10ST 12 16 20 25

CJP

F 15st R 5st 10st S 15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5 12 27 31 7 16.5 22.5 29 19 14 4.2 M5 X 0.8 M22 X 1.5 20 23.5 29.5 36 5 37.5 43.5 50 6 Plug Mounting Style CJPS B C E G H K MM NN 5st 10st F 15st R 5st 10st

Made to Order

15st 5st 10st 15st 5st 10st 15st 5st 10st 15st 6 8 9 42 42 47 52 57 47 52 57 52 62 67 52 62 67 10 8 9 45 45 50 55 65 50 55 65 55 65 80 55 65 80 16 8 9 39 49 44 49 59 54 59 69 59 69 84 69 79 94 20 8 9 45 55 50 55 65 60 65 75 55 65 80 65 75 90 25 10 11 51 61 56 61 71 66 71 81 61 71 86 71 81 96 32 12 13 55 65 60 65 75 70 75 85 65 75 90 75 85 100 Dimensions except mentioned above are the same

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter-Out, Flow Rate(l/min): 230, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1～

Body Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: N01 (1/8 NPT), Applicable Tube OD: 10mm, Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Port Size: 01 (1/8), Applicable Tube OD: 10mm, Sealant: S (Sealant)

Body Size: 1/8, 1/4 Basis, Style: Elbow, Control Method: Meter-out, Port Size: 1/8 NPT, Applicable Tube OD: 10mm, Sealant: Sealant