Table of Contents

Piston speed (mm/s) Piston speed (mm/s) 1.

Magnetically Coupled Rodless Cylinder

50 mm/s.

Basic type / Direct mount type Series CY3B/CY3R

50 Individual -X Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Technical data 1235 Series CY1F Precautions at Vertical Operation and Intermediate Stop Vertical Actuation 1.

Parallel Style Air Gripper Series MHZ

C S C S C S C 0.016 0.043 MHZL2-10 K 12f8 62.8 11 7 15 End boss assembly Applicable tubing Plug 0.016 0.043 MHZL2-16 K 16f8 66.4 15 10 20 H G Note 1) 0.020 0.053 MHZL2-20 K 20f8 81.7 19 12 22 D2 0.020 0.053 Other dimensions and specifications correspond to the standard type.

Flow Control Equipment

Symbol None Sealant S Applicable tube O.D.

CYP

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

MHZ2/MHZJ2

Single acting (normally open) Single acting (normally closed) Without auto switch (built-in magnet) Nil D S C Select an applicable auto switch model from the table below.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CYP_EN

Max. operating speed is 300mm/s. If the speed is in excess of the maximum rate, it exceeds the allowable range of the suction cushion at the end of stroke, and may cause an excessive impact and bouncing of the slide table. 9. Do not apply load and moment not less than the allowable range to the slide table.

ZP

-N01-B12 ZPX100-T01-B12 ZPX125-B01-B10 ZPX125-N01-B10 ZPX125-T01-B10 ZPX125-B01-B12 ZPX125-N01-B12 ZPX125-T01-B12 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X2-B01-B10

ZP

-N01-B12 ZPX100-T01-B12 ZPX125-B01-B10 ZPX125-N01-B10 ZPX125-T01-B10 ZPX125-B01-B12 ZPX125-N01-B12 ZPX125-T01-B12 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X2-B01-B10

ZP

-N01-B12 ZPX100-T01-B12 ZPX125-B01-B10 ZPX125-N01-B10 ZPX125-T01-B10 ZPX125-B01-B12 ZPX125-N01-B12 ZPX125-T01-B12 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X2-B01-B10

Vacuum Pad

-N01-B12 ZPX100-T01-B12 ZPX125-B01-B10 ZPX125-N01-B10 ZPX125-T01-B10 ZPX125-B01-B12 ZPX125-N01-B12 ZPX125-T01-B12 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X2-B01-B10

Vacuum Pad

-N01-B12 ZPX100-T01-B12 ZPX125-B01-B10 ZPX125-N01-B10 ZPX125-T01-B10 ZPX125-B01-B12 ZPX125-N01-B12 ZPX125-T01-B12 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X2-B01-B10

Vacuum Pad

-N01-B12 ZPX100-T01-B12 ZPX125-B01-B10 ZPX125-N01-B10 ZPX125-T01-B10 ZPX125-B01-B12 ZPX125-N01-B12 ZPX125-T01-B12 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X2-B01-B10

Vacuum Pad

-N01-B12 ZPX100-T01-B12 ZPX125-B01-B10 ZPX125-N01-B10 ZPX125-T01-B10 ZPX125-B01-B12 ZPX125-N01-B12 ZPX125-T01-B12 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X1-B01-B8 ZPA-X1-N01-B8 ZPA-X1-T01-B8 ZPA-X1-B01-B10 ZPA-X1-N01-B10 ZPA-X1-T01-B10 ZPA-X2-B01-B10 ZPA-X2-N01-B10 ZPA-X2-T01-B10 ZPA-X2-B01-B12 ZPA-X2-N01-B12 ZPA-X2-T01-B12 ZPA-X2-B01-B10

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection thread 10 13 16 20 25 32 10 20 30 40 50 B5 A10 M5 x 0.8 5 13 8 N S U F GN GS 10 4.5 15 J K ZP T U 10 20 30 50 5 9 B5 M5 x 0.8 40 50 A14 10 B01 N01 T01 16.5 Rc1/8 NPT1/8 NPTF1/8 13 20 30 50 12 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber 2 Indicates