Table of Contents

50 70 Note 1) J dimension is at fully closed.

2/3 Port Valve

: D Conduit terminal: T VX VNl VQ Grommet Conduit DIN connector Conduit terminal Electrical entry P Port size Rc(PT) A B C D E Model Energized open F H J F H J F H J K F H J K VX22 05 6 02 03 02 03 VX23 05 6 VX2260-04 VX2360-04 23 35 25.5 40 23 35 25.5 40 83 91 89 97 62 69 65 72 25.5 28 25.5 28 83 91 89 97 54 62 57 65 41 44 41 44 83 91 89 97 54 62 57 65 60 62 60 62 48 50 48 50 100 108 106

Compact Cylinder

3 mm or more, W1: 6 mm or less For 12 J: 4 mm or more, W1: 6 mm or less 16 J: 4 mm or more, W1: 6 mm or less J: 4 mm or more, W1: 6 mm or less XA2 20 J: 5 mm or more, W1: 11 mm or less J: 5 mm or more, W1: 11 mm or less 25 J: 6 mm or more, W1: 13 mm or less J: 6 mm or more, W1: 13 mm or less For 12 H: M4 or less H: M4 or less 16 H: M6 or less H: M6 or less XA6 20 H: M6 or less H: M6 or less

ZP

C J H F I Hexagon width across flats 8 M5 x 0.8 J H F Hexagon width across flats 10 Hexagon width across flats 2 Hexagon width across flats 12 M8 x 1.25 Y D C Hexagon width across flats 12 Hexagon width across flats 3 2 A B 3 2 A B Dimensions: 10 mm Stroke (mm) With a stroke of 10 mm A B C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5 27 38.5 74.5 1.5 ZPT13F10-B5-A10 13 15 23 10.5 13 27.5

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

CATALOG VC10

H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

TABLE OF CONTENTS

H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

ZP

K Y A J K B Y C D Misc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For details, refer to page 7-6-23.

10

Note) Since the bracket is attached to the resin body type H, J, L, M, XB cannot be selected. Note) Since the bracket is attached to the resin body type H, J, K, L, M, N, XB cannot be selected. 24 UL-compliant Series VX21/22/23 Refer to pages 21 to 23 for electrical options, other options, and bracket/electrical entry direction.

AC

Model Port size Q M B B A B C D P E F G H J K L M5 x 0.8 25 40 53 70 75 90 95 66 97.5 129 165 169 244 258 7 11 14 18 20 24 24 25 40 53 70 70 90 95 86.5 120.5 27.5 40 56 73 73 AF1000 AF2000 AF3000 AF4000 AF4000-06 AF5000 AF6000 8, 1 4 1 17 16 17 14 23 23 30 41 50 50 70 70 27 40 54 54 66 66 22 23 26 25 35 35 5.4 6.5 8.5 8.5 11 11 8.4 8 10.5 10.5 13 13 40 53 70 70 90 90 2.3 2.3 2.3 2.3 3.2 3.2

•

R13g 1 3 15 12 21 29.9 46 5 6 3 1.8 '2.~,1 ''2,H 23 22 ZPR13 -,ZPR16g 1 6 18 12.5 21.5 30.' 46.5' 5 6 3.5 1.2 ZPR10 23 22 23 22 22 Deep type (mm) I Model M ,.8 C D E F M:M5xO~J M:M6X1 y G ! G ZPR16 23 22 ZPR20' !

MXQ

23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 123 123 123 133 157 182 221 274

Air Cylinder

0.035 J 0.090 J Air cushion Allowable kinetic energy (Effective cushion length) 0.07 J (9.4 mm) 0.18 J (9.4 mm) Stroke length tolerance +1.0 0 Made to Order: Individual Specifications (For details, refer to pages 150 and 151.)

0.4

stations/Single wiring Note) F/P/J/G kit are available with Nil only.

Combination Cylinder

102 116 22 27 27 32 41 30 35 35 40 40 27 32 32 37 37 Bore (mm) X W S PW PL PH PG P N MM LZ LY LX LT LS LH LD KA K J H1 40 50 63 80 100 1/4 3/8 3/8 1/2 1/2 8 0 0 0 0 27 27 34 44 43 45 50 60 70 80 153 168 182 208 226 11 10 13 15 15 20 21 23 23 25 42 46 48.5 55 56.5 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 30 31 37 40 70 80 93 116 133 81 90 106 131 148 42 50 59 76 92 3.2 3.2 3.2

AC Servo Motor Driver (Pulse input type/Positioning type ）

Station No. 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 ASCII code 0 1 2 3 4 5 6 7 8 9 A B C D E F Station No. 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 ASCII code G H I J K L M N O P Q R S T U V For example, "30H" is transmitted in hexadecimal for the station No. "0" (axis 1). 14 8 14.

Mechanically Jointed Rodless Cylinder Series MY1

(mm) PA PB PG Q PP QW QQ RR SS TT UU WW Model VV XX Z YH PC PD PE PF ZZ 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 16 28 220 37.5 14.5 32 13 5.5 Rc 1/16 80 60 8 264 17 51 16 23 4 16 16 16 MY1H32 19 32 280 47 15 42 13 6.5 Rc 1/16 100 80 9 322 18.5 59 24 27 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 Y 2 x d S R WX D Bottom ported (ZZ) (Applicable O-ring) DHole Size for Centralized

Base Mounted Metal Seal/Rubber Seal Series VQ

VVQ2000-3A-1Option Electrical entry For F kit For P kit For J kit For L kit For G kit For S kit F P J L G S Note 1) Note 2) When both options are specified, indicate as RS. The housing assembly and SI unit of F/P/J/G/S kit are not included. Separately place an order for q, w, e, and r. For Dusttight/Low jetproof type (IP65), please consult with SMC.

CL

21 23 23 25 8 0 0 0 0 45 50 60 70 80 10 12 16 20 25 6 7 7 11 11 242 269 288 336 365 MXU MXS MXQ Clevis pin, flat washer and cotter pin are packed.