Body Size: 60, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 10 (1), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 50, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 10 (1), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 60, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 10 (1), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 60, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 10 (1), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 50, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 10 (1), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

PFxx-OMJ0005CN

1.1.21.6.2 -5No.PF-OMJ0005CN-I * 14 FG (49 N () IN () -6No.PF-OMJ0005CN-I * () 6 33 () () 30 m DC(-)() -7No.PF-OMJ0005CN-I * () () CE 0~50 -8No.PF-OMJ0005CN-I * 3 (20 ) LED * OUT * 23% -9No.PF-OMJ0005CN-I 7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V

PF-OMN0009_C

./(15V) 3 DC() 4 (1~5V420mA) PF3W5 M8 PF3W5--1/2 15 V/420 mA DC(+) 15 V 1 k 420 mA 15V/420mA NC DC(-) 12 V 300 24 V 600 PF3W5--1T 15 V DC(+) 15V 15 V 1 k 15V DC(-) -22No.PF-OMN0009CN-F 1 3 OFF 2 1 PF3W5--1(15 V ) 2 PF3W5--2(420 mA ) 3 PF3W5--1T(15 V ) LED() -23No.PF-OMN0009CN-F , -24No.PF-OMN0009CN-F PF3W5 , ,, (), DC(+) DC(-) (OUT1) (OUT2) 40 () -25No.PF-OMN0009CN-F

HRX-OM-W060

11 100 + Analog output 1 : CH2 Circulating fluid temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig. 3-10 Circuit diagram 3.3 Installation HRL Series 3-20 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.3.5 Wiring of Run/Stop signal input This product can be remotely controlled by the

HRX-OM-Y098

11 100 + Analog output 1 : CH2 Circulating fluid temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig. 3-10 Circuit diagram 3.3 Installation HRL Series 3-20 HRX-OM-Y098 Chapter 3 Transport and Setting Up 3.3.5 Wiring of the Run/Stop signal input This product can be remotely controlled by

HRX-OM-X037

11 100 + Analog output 1 : CH2 Circulating fluid temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig. 3-11 Circuit diagram HRL Series 3.3 Installation 3-21 HRX-OM-X037 Chapter 3 Transport and Setting Up 3.3.5 Wiring of the Run/Stop signal input This product can be remotely controlled by

DOC1003626

11 100 + Analog output 1 : Circulating fluid discharge temperature -15V 23 Analog output 1 common ANALOG COM +15V 10 100 + Analog output 2 : Circulating fluid discharge temperature -15V 22 Analog output 2 common ANALOG COM Fig.2-2 Circuit diagram 2.2 Communication specification HRS400-A-46 2-4 DOC1003626 Chapter 2 Contact input/output communication / Analog output communication 2.3 Contact

HRX-OM-W069

11 100 + Analog output 1 : CH2 Circulating fluid discharge temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Circulating fluid electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig.2-1 Circuit diagram 2.2 Communication specification HRL Series 2-4 HRX-OM-W069 Chapter 2 Contact input/output communication /Analog output communication 2.3

Body Size: 60, Backflow: w/o Backflow Function, Thread: NPT, Port Size: 1, Options: Square Embedded Type Pressure Gauge, w/Limit Indicator, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Upward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: 0.4 MPa Setting

Body Size: 60, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 10 (1), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting

IZ-OMU0031-CN

-2No.IZ*-OMU0031 1 1.5 3) 3) 1 1 () [] -3No.IZ*-OMU0031 () () () () -4No.IZ*-OMU0031 () * UL * FG * 6 33 () () 10 m 10mm DC(-)() -5No.IZ*-OMU0031 UL1310 2 UL1585 2 UL * () CE 050 * 2030 1 LCD 33OFF * -6No.IZ*-OMU0031 IZE11 3 C 2 A B C + 1 L 0 NPN2+15V 1 NPN2+420mA 2 PNP2+15V 3 PNP2+420mA / ZS-28-A 2 m ZS-28-B M3X5 L (2 ) ZS-28-C 1 ZS-27-C M3X8 L(2) + ZS-27-D M3X8

Table of Contents

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

VFS

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

V100

DC EZ, TZ, DZ, YZ (100 VDC or more) EZ, TZ, DZ, YZ (100 VDC or more) Z EZ, TZ, DZ, YZ (24 VDC or less) Note) W/ surge voltage suppressor is available only for grommet type. 4-8-3 4 Series VP300/500/700 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. Caution Change of Actuation Caution How to Use DIN Terminal 1.

VQ7-6/7-8

Instructions P.37 5 Port Solenoid Valve/Precautions P.38 to 40 Specific Product Precautions P.41, 42 Series VQ7-6 ISO Standard Solenoid Valve Size 1/Single Unit How to Order Valves VQ7 6 FG S 3 Passage symbol (A) 4 (B) 2 Connector Nil O SC DIN terminal block (with connector) DIN terminal block (without connector) Prewired connector FG 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Sub plate port size YZ

VQ7-6/7-8

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Sub-plate port size Thread type Rc Nil Without sub-plate Side ported Rc 1/4 Nil A02 A03 B02 B03 YZ NPTF T G F Side ported Rc 3/8 Bottom ported Rc 1/4 1 (P) 5 (R1) 3 (R2) Bottom ported Rc 3/8 (A) 4 (B) 2 Port R is Rc