HRX-OM-X010

18 Output 100 + 11 -15V 11 Output Temp.PV Analog Output*2 Temp.PV Analog Output*2 23 ANALOG COM 23 Output [-100 to 100deg C:-10 to 10V] [-100 to 100deg C:-10 to 10V] +15V 100 + ANALOG CIRCUIT 10 10 Output DI PV Analog Output*3 DI PV Analog Output*3 -15V 22 22 Output ANALOG COM [0 to 20 M:0 to 10V] [0 to 20 M:0 to 10V] +15V 12 Intput Temp.SP Analog Input*3 Temp.SP Analog Input*3 12 + -15V

HRX-OM-M005

100 + 11 -15V 23 ANALOG COM +15V ANALOG circuit 100 + 10 -15V 22 ANALOG +15V COM 12 + -15V 1M 24 ANALOG *1: The recovery signal can be input only when the COM circulating fluid automatic collection function 13 25 EMO SW (optional) is used, and it does not serve as the DIO REMOTE signal.

PFxx-OMJ0005CN

1.1.21.6.2 -5No.PF-OMJ0005CN-I * 14 FG (49 N () IN () -6No.PF-OMJ0005CN-I * () 6 33 () () 30 m DC(-)() -7No.PF-OMJ0005CN-I * () () CE 0~50 -8No.PF-OMJ0005CN-I * 3 (20 ) LED * OUT * 23% -9No.PF-OMJ0005CN-I 7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V

PF-OMN0009_C

./(15V) 3 DC() 4 (1~5V420mA) PF3W5 M8 PF3W5--1/2 15 V/420 mA DC(+) 15 V 1 k 420 mA 15V/420mA NC DC(-) 12 V 300 24 V 600 PF3W5--1T 15 V DC(+) 15V 15 V 1 k 15V DC(-) -22No.PF-OMN0009CN-F 1 3 OFF 2 1 PF3W5--1(15 V ) 2 PF3W5--2(420 mA ) 3 PF3W5--1T(15 V ) LED() -23No.PF-OMN0009CN-F , -24No.PF-OMN0009CN-F PF3W5 , ,, (), DC(+) DC(-) (OUT1) (OUT2) 40 () -25No.PF-OMN0009CN-F

DOC1001322

11 100 + Analog output 1 : Circulating fluid discharge temperature -15V 23 Analog output 1 common ANALOG COM +15V 10 100 + Analog output 2 : Circulating fluid discharge temperature -15V 22 Analog output 2 common ANALOG COM Fig. 3-10 Circuit diagram 3.3 Installation HRS Series 3-20 DOC1001322 Chapter 3 Transport and Setting Up 3.3.5 Wiring of the Run/Stop signal input This product can be

HRX-OM-W060

11 100 + Analog output 1 : CH2 Circulating fluid temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig. 3-10 Circuit diagram 3.3 Installation HRL Series 3-20 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.3.5 Wiring of Run/Stop signal input This product can be remotely controlled by the

HRX-OM-Y098

11 100 + Analog output 1 : CH2 Circulating fluid temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig. 3-10 Circuit diagram 3.3 Installation HRL Series 3-20 HRX-OM-Y098 Chapter 3 Transport and Setting Up 3.3.5 Wiring of the Run/Stop signal input This product can be remotely controlled by

HRX-OM-X037

11 100 + Analog output 1 : CH2 Circulating fluid temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig. 3-11 Circuit diagram HRL Series 3.3 Installation 3-21 HRX-OM-X037 Chapter 3 Transport and Setting Up 3.3.5 Wiring of the Run/Stop signal input This product can be remotely controlled by

DOC1003626

11 100 + Analog output 1 : Circulating fluid discharge temperature -15V 23 Analog output 1 common ANALOG COM +15V 10 100 + Analog output 2 : Circulating fluid discharge temperature -15V 22 Analog output 2 common ANALOG COM Fig.2-2 Circuit diagram 2.2 Communication specification HRS400-A-46 2-4 DOC1003626 Chapter 2 Contact input/output communication / Analog output communication 2.3 Contact

HRX-OM-W069

11 100 + Analog output 1 : CH2 Circulating fluid discharge temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Circulating fluid electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig.2-1 Circuit diagram 2.2 Communication specification HRL Series 2-4 HRX-OM-W069 Chapter 2 Contact input/output communication /Analog output communication 2.3

HRX-OM-Y120

11 100 + Analog output 1 : CH2 Circulating fluid discharge temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Circulating fluid electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig.2-1 Circuit diagram 2.2 Communication specification HRL Series 2-4 HRX-OM-Y120 Chapter 2 Contact input/output communication/Analog output communication 2.3 Contact

Body Size: 30, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 30, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 30, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 30, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 25, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 25, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)