Metal Seal/Rubber Seal Series VQ Body Ported

Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-69.

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

1

Series CQS Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) Stroke Both of S1, S2 Bore size (mm) A B L 12 17 (22) 3.5 41 (51) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Stainless steel is used for size 10 only. 97 Series CRBU2WU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type CRBU2WU10, 15, 20, 30-S 2 x S2 2 x S1 2 x S1 2 x S1 Free mounting rotary actuator A port B port 2 x R Angle adjuster Cap Figures above show actuators for 90 and 180 when B port is pressurized,and they show size 20 actuators.

Electric Actuator

to 100 25 92 1 26.5 40 87 120 14.1 123.9 156.9 15.8 82.4 115.4 14.1 123.5 156.5 15.8 105 to 400 20 to 100 32 118 1 34 60 88.2 128.2 17.1 116.8 156.8 17.1 76.6 116.6 17.1 116.1 156.1 17.1 105 to 500 Motor left side parallel type/LEY L 25 32 Motor right side parallel type/LEY R 25 32 U S1 U S1 [mm] T2 T2 S1 T2 U Size 25 32 47 91 1 61 117 1 Note) When the motor is mounted on the left or right

LEC-OM071xx

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2. Station Address S1 S2 00H to 02H: Disabled (Do not use these addresses.) 0 0 to 2 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled (Do not use these addresses.)

Base Mounted Metal Seal/Rubber Seal Series VQ

With lead wire ZS-20-A ZS-20-5A-50 0.6 m 3 m 5 m Nil 30 50 (The flow characteristics are for the supply pressure of 0.5 MPa.)

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Electric Actuator

0 10 20 30 40 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey L2 [mm] m 500 500 500 L2 0 0 0 0 5 10 15 20 0 10 20 30 40 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 L3 [mm] 400 400 400 Mer m 200 200 200 0 0 0 0 5 10 15 20 0 10 20 30 40 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 82

CRBU

CRBUWU10-lD CRBUWU15/20/30-lD The dimensions below are based on size 20.

Step Motor Controller

LE CP 1 (14.2) (13.5) Connector C Actuator side (Terminal no.) 1 2 Cable length (L) 1 3 5 8 A B C (14) (18) A1 B1 8 1.5 m 3 m 5 m 8 m (17.7) (17.7) 5 6 1 2 Connector A A6 B6 Connector D 10 m L (11) (30.7) (14.7) 5 6 15 m (10) 20 m Controller side Produced upon receipt of order 8 10 15 20 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) (Terminal no.) (14.2) (13.5

Series SV

pins) Common Common Common Common 20 26 19 25 SOL.

Electric Actuator

For auto switches, refer to pages 19, 20.

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 5,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 2, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 2, Drain Exhaust: [Not Provided] No, Flow Direction: [Right] From Left to Right, Size of Body: 2B, Accessory: None

Model: U (DP Lube Unit), Size: 9 (2B), Thread: Rc(PT), Port Size: 20 (2)

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Table of Contents

ZS-20-5A-50 . 1 pc.

PC Wiring System Series PCW

JAPAN 42 4 5 6 7 1 + *S2 S1 2 3 4 4 4 (28.5) 3 80 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 + 28.3 CS0 CS1 YMX-F4 0 1 2 3 DC24V MADE IN JAPAN 45 4.1 4 5 6 7 1 + *S2 S1 2 3 4 5.1 (48.5) 83 10.5 10.5 (50) Branch output unit can be used for mixed connection PCW series.

ZX

1 20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

2

) Note 20) Note 20) Note 20) Note 20) Note 20) Note 20) Note 15) The combination of metal bowl: 2 and 8 is not available.