Air Slide Table

Model M MXQ8B-10ZN 72 MXQ8B-20ZN 82 MXQ8B-30ZN 92 MXQ8B-40ZN 110 MXQ8B-50ZN 120 MXQ8B-75ZN 164 MXQ8B-100ZN 189 * Dimensions other than those listed above are the same as those for the standard type. 60 MXQB Series Dimensions: MXQ 12B [Standard] MXQ 12B-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Compressed Air Cleaning Filter Series

Series AFF Dimensions AFF75B Auto drain 220 110 D: With auto drain (N.O.) for AFF75B 18 220 184 6 23 3/8 female threaded (Accessory) Bracket 220 180 24 120 Option 15 30 348 464 13 T: With element service indicator 42 58 OUT IN IN OUT 461 Drain 10 Rc 3/8 female threaded Maintenance space AFF75A to 220A 3 x 20 holes For foundation bolt OUT Label Drain ORIENTATION IN (mm) G 184 184 236 300 (12B

5-Port Solenoid Valve

Common Dimensions SOL.b SOL.a (+) () 12A Station 12 (+) () 12B Mixed Mounting SOL.b SOL.a (+) () 13A Station 13 (+) () 13B Manifold Exploded View SOL.b SOL.a (+) () 14A Station 14 (+) () 14B Fitting, Plug Part Nos. SOL.b SOL.a (+) () 15A Station 15 (+) () 15B Manifold Options SOL.b SOL.a (+) () 16A Station 16 (+) () 16B (+) COM. () () (+) COM.

Compact 5-Port Solenoid Valve

SOL.b SOL.a (+) () 12A Station 12 (+) () 12B SOL.b SOL.a (+) () 13A Station 13 (+) () 13B SOL.b SOL.a (+) () 14A Station 14 (+) () 14B SOL.b SOL.a (+) () 15A Station 15 (+) () 15B SOL.b SOL.a (+) () 16A Station 16 (+) () 16B (+) COM. () () (+) COM.

Table of Contents

7 Series AMD AMD801/901/800/900/1000 Dimensions AMD801/901 ORIENTATION Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Label Model Connection (Flange) 2B 2B, 3B, 4B 400 A 280 B 760 D 150 E 270 F 1033 G 3 H 887 J 6B C 620 AMD801 AMD901 445 795 300 520 1318 3 972 12B

0.4

A 5B 3 stations White 6A 6B Black 7A 7B 4 stations White 8A 8B How to Increase Manifold Stations Black 9A 9B 5 stations White 10A 10B 5B SOL.A COM (Red) Black 6 stations 11A 11B 12A 12B Construction COM. 13A Red COM (Red) COM (Red) 13A 13B Manifold Specifications Example Red 13B COM.

SQ1000/2000

A COM (Red) Black 5B Station 6 11A 11B 12A 12B COM Red 13A Red (COM) Red (COM) 13A 13B COM Manifold specification example Red 13B Stations 1 The drawing above shows connections for type 26P flat ribbon cable connector based on the manifold specification example in the table to the left.

0.

PR plate VQZ100-12A (Standard) VQZ100-12B (External pilot type) 2 set screws are included.

Model: DP Lube Single Unit, Size: 2B, Thread: Rc(PT), Port Size: 1+1/4, Accessory: Bracket, Option: S1 [1b (w/o Oil ON)]

Model: DP Lube Single Unit, Size: 9 (2B), Thread: Rc(PT), Port Size: 12 (1+1/4), Accessory: B (Bracket), Option: S1 [1b (w/o Oil ON)]

NCQ2/CQ2

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 Warranty and Operating Instructions Bore size 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) +

Compact Cylinder

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 Bore size 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) + Stroke S1 170.5 (180.5) + Stroke S1

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

JXCx-OMT0023

Driver No-fuse breaker (Note) Fuse Current Voltage AC Current Voltage AC LECSA2-S1 50A frame 5A 10A LECSA2-S3, LECSA1-S1 50A frame 10A 240V 15A 300V LECSA2-S4, LECSA2-S3 50A frame 15A 20A Note.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

XG_-OMV0028

9 22 13 12 18 9 27 12 13 18 9 18 , 21O 5 6 7 ASSY O 4 3-3 2A2B CLOSEOPEN 8 9 9 13 12 18 12 18 2 A 16 U 17 21 23 2B 9 10B 11 9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Micromist separator AMD900, 1000, 901 Model Connect (Flange) 2B 6B C 2B/3B/4B 400 A 280 B 760 D 150 E 270 F 1033 G 3 H 887 J 620 AMD801 AMD901 12B 445 795 300 520 1318 3 972 AMD800/900/1000 ORIENTATION Mounting Caution q Verify the direction of the flow of the compressed air and the "e" mark that indicates the inlet of the product before connecting.

AMF

Micromist separator AMD900, 1000, 901 Model Connect (Flange) 2B 2B/3B/4B 400 A 280 B 6B C 550 D 150 E 270 F 823 G 3 H 797 J 620 AMF801 AMF901 445 12B 570 300 520 1093 3 867 AMF800/900/1000 Mounting Caution q Verify the direction of the flow of the compressed air and the "e" mark that indicates the inlet of the product before connecting.