Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Adjustable oil drop rate, Bowl can be attached and detached with one hand, Optional drain cock for one touch drain exhaust, Provides accurate lubrication

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Adjustable oil drop rate, Bowl can be attached and detached with one hand, Optional drain cock for one touch drain exhaust, Provides accurate lubrication

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Adjustable oil drop rate, Bowl can be attached and detached with one hand, Optional drain cock for one touch drain exhaust, Provides accurate lubrication

Electric Actuator/Slider Type

Overhang: L1[mm] 1,500 Mep 1000 mm/s2 m 3000 mm/s2 1,000 L1 500 5000 mm/s2 00 5 10 15 20 Work load [kg] Based on the above calculation result, the LEFS25RA-200 is selected.

Environment

gravity [mm] Model LEJS40 LEJS63 LEJB40 LEJB63 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 2000 2000 1000 1000 L7 800 800 1500 1500 L7 [mm] L7 [mm] L7 [mm] L7 [mm] 600 600 1000 1000 m Me X 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

gravity [mm] Model LEJS40 LEJS63 LEJB40 LEJB63 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 2000 2000 1000 1000 L7 800 800 1500 1500 L7 [mm] L7 [mm] L7 [mm] L7 [mm] 600 600 1000 1000 m Me X 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0

15

10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 11LEFS 2000 1000 11LEJS 800 m Me 1500 L3 [mm] L3 [mm] 600 25AL3 1000 Z 400 500 LEC 200 0 0 LEC S 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] LEC SS-T 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 2000 1000 LEC Y 800 1500 L4 [mm] L4 [mm] m Me L4 600 1000 X

Integrated Controller

W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000

Table of Contents

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

Battery-less

750 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] Basic type 0.02 High-precision type 0.015 (Lead H: 0.02) Lost motion [mm]*3 Basic type 0.1 or less High-precision type 0.05 or less Lead [mm] 10 5 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2]

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

gravity [mm] Model LEJS40 LEJS63 LEJB40 LEJB63 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 2000 2000 1000 1000 L7 800 800 1500 1500 L7 [mm] L7 [mm] L7 [mm] L7 [mm] 600 600 1000 1000 m Me X 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0

Slider Type Ball Screw Drive/11-LEFS Series

Horizontal Vertical LC3F2 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000 Duty ratio: 100% Duty ratio: 100% 12500 12500 10 10 7500 7500 5000 5000 2500 2500 0 0 0 10 20 30 40 0 5 10 15 20 Work load [kg] Work load [kg] 49 LEFS Series AC Servo Motor Clean Room Specication Work LoadAcceleration

Electric Actuator with Integrated Guide

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Electric Actuator with Integrated Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8

Compact

LEJ m 200 20 mm/s2 LEL 100 0 LEM LEM 0 5 10 15 20 Based on the above calculation result, the LEMH32T-500 is selected.

V100

(Conforming to DIN) Clip Without indicator light AXT100-20-1 Rated voltage With indicator light 16.8 Voltage symbol Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

Environment

]) 20 40 60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note 4) Note 5) 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 Speed [mm/s] Note 5) 18 to 400 9 to 200 5 to 100

Table of Contents

20 20 1.

2

) Note 20) Note 20) Note 20) Note 20) Note 20) Note 20) Note 15) The combination of metal bowl: 2 and 8 is not available.

Made to Order

CQS series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) (mm) Bore size (mm) Stroke Both of S1, S2 A B L 12 3.5 41 (51) 17 (22) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) -X -X 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.

1

Series CQS Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) Stroke Both of S1, S2 Bore size (mm) A B L 12 17 (22) 3.5 41 (51) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.