V100

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

Programless controller Step motor (servo 24 VDC)

1200 90 1200 10 250 1400 150 1400 100 1400 11 300 1600 180 1600 110 1600 12 350 1800 210 1800 120 1800 13 400 2000 240 2000 130 2000 14 450 2500 270 2500 140 2500 15 500 3000 300 3000 150 3000 LEY40A / LEYG40A LEY40B / LEYG40B LEY40C / LEYG40C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 24 200 12 200 6 200 1 32 300 20 300 10 300

Table of Contents

(Refer to page 8-14-26.)

Integrated Controller

0 Speed: V [mm/s] EQFS16HB/Ball Screw Drive Horizontal/Lead 5 Vertical/Lead 5 16 14 12 10 8 6 4 2 0 50 100 150 200 250 300 350 400 450 7 3000 mm/s2 3000 mm/s2 6 Work load: W [kg] Work load: W [kg] 5 4 10 mm/s2 5000 mm/s2 3 2 1 0 0 0 Speed: V [mm/s] 50 100 200 150 250 300 350 400 450 Speed: V [mm/s] EQFS16HC/Ball Screw Drive Horizontal/Lead 2.5 Vertical/Lead 2.5 20 18 16 14 12 10 8 6 4 2

Made to Order

66 44 20 64 10.5 7 75, 100 157.5 40.5 63 50 or less 155 36 165 46 14 8 20 30 16.5 19.5 12.5 66 44 20 77 10.5 7 75, 100 165 46 Bore size K L M O P Q R RR RR1 U1 W Z A1 A2 B1 C1 H1 L1 MM X 32 14 46 34 M6 x 1.0 1/8 10 10 10 12 14 49.5 14 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 40 14 46 40 M6 x 1.0 1/8 12.5 10 10 12 14 57 15 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 50 17 59 50 M8 x 1.25 1/4 10.5 14 14

LEC-OM069xx

Setting (byte) 1 to 65535 10 Pn80A 1st Linear Acceleration Constant 1 2 100 reference units/s2 1 to 65535 10 Pn80B 2nd Linear Acceleration Constant 1 2 100 reference units/s2 0 to 65535 100 reference Pn80C Acceleration Constant Switching Speed 1 2 0 units/s 1 to 65535 10 Pn80D 1st Linear Deceleration Constant 1 2 100 reference units/s2 1 to 65535 10 Pn80E 2nd Linear Deceleration Constant

EX120/121/122

5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR 13 PWR e 15 e t y y t Shown with cover removed.

1

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.

Table of Contents

0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430

Electric Actuator with Integrated Guide

to 9800mm/s2 Note) Note) There are cases in which the position, speed and acceleration designations are not realized, depending on the actuator that is connected and the operating conditions.

Metal Seal/Rubber Seal Series VQ Body Ported

4-16 Side entry Top entry Side entry U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J

Electric Actuator

20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 15000 15000 Duty ratio: 50% Duty ratio: 50% 10 10 5000 5000 Duty ratio: 75% Duty ratio: 75% 0 0 0 20 5 10 15 0 30 25 10 5 20 15 Work load [kg] Work load [kg] 5 Model Selection Series LEJ Dynamic Allowable Moment Model Selection LEJS LEJB Acceleration 5,000 mm/s2 10,000 mm/s2 15,000 mm/s2 20,000 mm/s2 Orientation Horizontal

1

108 49 14 30.7 14 108 54 14 33.2 14 110 64 14 36.5 15 121 77 14 41 16 136 92 17 46.2 16 139 100 17 53.2 23 165 115 23 62.2 23 165 140 26 72.7 Specifications other than above are the same as standard type.

Table of Contents

MHK2-20 20 10 Standard: Chloroprene rubber (CR) Black Optional: Fluoro rubber (FKM) Black Silicon rubber (Si) White MHK2-25 25 14 Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 MHKL2-12 12 11 Standard stroke 4 6 10 14 11 14 18 22 MHKL2-16 16 14 Long stroke type Series MHKL2 MHKL2-20 20 18 MHKL2-25 25 22 12-6-2 12-6-3 3 Wedge Cam Operation Slide Guide Air Gripper Series

Compact

LEMH32 LEMH32 0 2 4 6 8 10 12 14 16 18 20 22 20 Acceleration/Deceleration [mm/s2] 15000 Stroke 1000 mm or less Work load [kg] 1200 mm 10 1500 mm 5000 0 0 5 10 15 20 Work load [kg] 0 500 1000 1500 2000 Speed [mm/s] 170 Model Selection LEM Series Step Motor (Servo/24 VDC) Selection Procedure Step 2 Check the dynamic allowable moment. 500 10 mm/s2 5000 mm/s2 400 2500 mm/s2 LEF L2 300 L2 [mm]

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

The operating time for D-J51 is 2 ms or less and for D-P3DW/P4DWL is 40 ms or less. 4) 980 m/s2 for the trimmer type sensor section, 98 m/s2 for the amplifier section.

Electric Slide Tables

22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 13 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

SFOD-OMT0010

(14) DRIVE input is turned OFF. (15) INP output is turned ON. (16) BUSY output is turned OFF.

CRBU

Port locations: Axial direction CRBUWl-lSE (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 (Depth) Q2 R S1 S2 T U V W X Model 10.5 8.5 10.5 11 11.5 14 12 15.5 10.5 9.5 10.5 10 11 13 13 14 CRBUW10-lS CRBUW10-lSE CRBUW15-lS CRBUW15-lSE CRBUW20-lS CRBUW20-lSE CRBUW30-lS CRBUW30-lSE M3 (4) M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 4 -0.004 -0.012 9 0 -0.043 29 22 14 8 3 25 31 41 15.5 M3 X 0.5 5 24 3.5