Hydraulic

IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 F J E B-series dH10 +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 +0.1 0 50 40 M8 x 1.25 185 145 57 79 M48 x 1.5 76 40 H -0.1

Compact Hydraulic Cylinder

. +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 H 0.1 0.4 D +0.1

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B series rod 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 H0.1 0.4 D 50 40 185 145 57 79 M48 x 1.5 76 M8 x 1.25 40 25 16 76 60 25 32 M16 x 1.5

Pulse Valve

Because of this, the air flows to the OUT side of the pulse valve. q w Caution Selection of Pilot Valve p. 3 The figure shows the JSXFAF . 11 Pulse Valve Valve for Dust Collector JSXFA Series Replacement Parts Model Replacement part number Main valve assembly (Main valve + O-ring) Sub-valve assembly (Sub-valve + O-ring) Silencer JSXFA(E, F)-06-BJSXF-06B-KT JSXFA(E, F)-06-B-A JSXF-06B-A-KT

JIS Standard Hydraulic Cylinder

. +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 CHQ +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 CHN H 0.1

VQ7-6/7-8

Rc1/2 (bottom) Rc1/2 (top) Rc1/2 (both sides) Rc3/4 (bottom) Rc3/4 (top) Rc3/4 (both sides) 04D 04U 04B 06D 06U 06B Air release valve Without With air release valve Nil E Manifold specifications Piping specifications Applicable solenoid valves Manifold block size Weight kg Stations 2 (B), 4 (A) port size 1 (P), 3 (R2) 5 (R1) port size ISO size 2 VQ7-8 ISO size 2 series Max. 10 stations 0.96n

Series VS

Symbol Port Thread NIL Rc (PT) F G (PF) N NPT T NPTF Locations and sizes of port 4(A), 2(B) Symbol Port location Applicable ISO size 02 Side 1/4 Size 1 03 Side 3/8 Size 1, 2 04 Side 1/2 Size 1, 2, 3 06 Side 3/4 Size 2, 3 10 Side 1 Size 3 02B Bottom and side 1/4 with plug on side Size 1 03B Bottom and side 3/8 with plug on side Size 1, 2 04B Bottom and side1/2 with plug on side Size 2, 3 06B

Vacuum Ejector Series ZM

Maximum Ejector Stations (Max. operable nos. simultaneously) Ejector model ZMA053 ZMA054 ZMA073 ZMA074 ZMA103 ZMA104 ZMA133 ZMA134 ZMA153 ZMA154 Manifold model R L 10 8 5 4 3 ZZMA Stations 06 10 10 8 6 5 ZZMA Stations 06B R L 10 8 5 4 3 ZZMA Stations 04 10 10 8 6 5 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

Serial Transmission System Series EX250 Series EX500

SV1100-5FU (4 sets) U side SS5V1-W16SA1WD-06B-C6 1 set (manifold part no.)

NCQ2/CQ2

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 Warranty and Operating Instructions Bore size 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) +

Compact Cylinder

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 Bore size 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) + Stroke S1 170.5 (180.5) + Stroke S1

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

JXCx-OMT0023

Driver No-fuse breaker (Note) Fuse Current Voltage AC Current Voltage AC LECSA2-S1 50A frame 5A 10A LECSA2-S3, LECSA1-S1 50A frame 10A 240V 15A 300V LECSA2-S4, LECSA2-S3 50A frame 15A 20A Note.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Vacuum Module Series ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) (D) Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1-K1-E (Release to atmospheric pressure) Spacer 1 (ZX1-S1) (For side mounting) Pressure sensor 78 Rc 1/8 EXH port (EXH.)

Air Fittings & Tubing

(mm) Part No. 0.1 KQH, KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04l 2.9 10.1 5.2 4 KQ2C-04A-l 8.5 5 2.2 0.1 2.2 4 KQ2C-04B-l 9.7 5 0.1 Kl 0.1 6 KQ2C-06l 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 Ml 2.2 6 KQ2C-06A-l 10.5 7 0.1 Hl 2.2 6 KQ2C-06B-l 12.0 7 0.1 8 KQ2C-08l 14.1

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) port size Air release valve None With silencer box Nil 3/8 (Right side) 1/2 (Right side) 3/8 (Left side) 1/2 (Left side) 3/8 (Bottom) 1/2 (Bottom) Mixed 03R None With air release valve Nil SB 04R E 03L Thread type 04L 03Y Rc G NPTF Nil 04Y F 1(P), 3(R2), 5(R1) port size T 1/2 (Down side) 1/2 (Up side) 1/2 (Both sides) 3/4 (Down side) 3/4 (Up side) 3/4 (Both sides) 04D 04U 04B 06D 06U 06B

VM

01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Polyacetal roller One way roller lever Hard steel roller Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B VM-07BS VM-07B VM-06BS VM-06B

VM

01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Polyacetal roller One way roller lever Hard steel roller Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B VM-07BS VM-07B VM-06BS VM-06B