Table of Contents

LD LG LH 10 10 to 40 61.5 74.3 8 4.5 2.8 19 LH LY 16 10 to 60 70.5 87.7 10 6.6 4 24 20 10 to 60 79 96.2 10 6.6 4 26 25 10 to 50, 75, 100 84.5 103.7 12 6.6 4 30 Y Y 4-LD X X LG LT 28 10 to 50, 75, 100 104 123.2 12 6.6 4 33 LS + Stroke LX LZ RE A B A + Stroke B + Stroke L REC 25, 28 Bore size (mm) LS LT LX LY LZ X Y CX 10 49.5 2 38 33.5 48 8 5 M LY 16 58.5 3.2 48 42 62 9.2 5.8 LH CY 20 64

Compact Cylinder

9.5 12.5 15.5 16 18 13 11 13.5 B 10 10.5 12.5 13 13.5 19 21.5 20.5 A 10 13 16 16.5 18.5 13.5 11.5 14 B 10.5 11 13 13.5 14 19.5 22 21 B 15.5 16 18 18.5 19 24.5 27 26 A 7.5 10 13 13.5 15.5 10.5 8.5 11 B 7.5 8 10 10.5 11 16.5 19 18 A 11.5 6.5 4.5 7 B 7 12.5 14.5 13.5 A 15 18 21 21.5 23.5 18.5 16.5 19 A 7.5 10 13 13.5 17 12 10 12.5 A 11.5 14 17 17.5 21 16 14 16.5 Bore size 12 16 20 25 32 40 50

F

21 17.2/10 10 14 KQS10-U02 8 17 28.5 22 21 39/26.6 10 38 KQS10-U03 8 17 26.5 20 21 39/26.6 10 12 KQS10-U04 8 21 27 19 21 39/26.6 12 14 KQS12-U02 8 19 35 25.5 22 46/44.5 12 38 KQS12-U03 9 19 28 19 22 60/44.5 12 12 KQS12-U04 9 21 27 19 22 60/44.5 P R O D U C T S E L E C T O R 45 M A L E E L B O W : KQK (KQ2K) Use to tubing toward 45 from the thread part.

Made to Order

Plug) FAFB C + Stroke S A + Stroke x 2 (RA) MC E + Stroke B + Stroke Common Dimensions (mm) Slide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM ML NN HA E MT K MB A MC Ball bushing 12 16 20 25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22

Table of Contents

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style A Without auto switch B P A B P Q Q With auto switch Bore size (mm) 5 st 10 st 20 st 20 st 5 st 10 st 5 st 10 st 5 st 10 st 5 st 10 st 20 st 20 st 20 st 20 st 5 st 10 st 32 40 50 Rc 1/8 40 46.5 M5 x 0.8 11.5 11 50 56.5 28 34.5 38 44.5 Rc 1/8 Rc 1/8 Rc 1/4 10.5 11 10.5 50 56.5 68.5 10.5 11 10.5 60 66.5 68.5 43 49.5 50.5 33 39.5 40.5 78.5 10.5 88.5 60.5 50.5 Rc 1/8

CQ2

W/o auto switch W/ auto switch Bore size (mm) 5st 10 20 5st 10 20 A B L L1 43 48 53 58 7 28.5 32 40 50 49.5 54.5 59.5 64.5 7 28.5 57.5 67.5 67.5 77.5 8 33.5 Double clevis (mm) 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 A B CL Without auto switch A B CL With auto switch Bore (mm) 65 70 28 33 55 60 75 80 38 43 65 70 32 40 50 73.5 78.5 39.5 39.5 63.5 68.5 83.5 88.5 44.5 49.5

A

) Bracket AMG150 BM51 AMG250 BM52 AMG350 BM53 AMG450 BM54 AMG550 BM55 AMG650 BM56 AMG850 BM57 Model Port NPT A mm B mm C mm S Y M B O L S AMG150 14 170 63 10 AMG250 38 191 76 10 AMG350 12 220 90 10 AMG450 34 241 106 10 AMG550 1 279 122 10 AMG650 1 12 388 160 10 AMG850 2 479 220 10 H O W T O O R D E R W AT E R S E P A R AT O R S E R I E S AMG AMG S U B-S TA N D A R D S P E C I F I C AT I O

Air Cylinder Series MB

42 M22 x 1.5 61 23 72 33 14 359 382 M10 x 1.5 3/8 157 38 69.5 100 265 26 10.5 26 10 42 M26 x 1.5 68 23 72 37.5 15 379 402 M10 x 1.5 1/2 177 38 Refer to page 701 for cylinders with a rod boot.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 10-SY3000 SY3000-38-20A 10-SY5000 SY5000-38-1 A 10-SY7000 SY7000-38-1 A EXH port (Both sides) E5 5 10-SY3000 SY3000-39-20A 10-SY5000 SY5000-39-1 A 10-SY7000 SY7000-39-1 A 1 8 1 4 10-SY9000 SY9000-39-1 A 1 4 1 8 1 4 10-SY9000 SY9000-38-1 A 1 4 P1 1 SUP port Note) In case of types 20P and 23P, for protection of the wiring unit section from drainage, piping at the EA

NCG/CG1

B A B A B A B A B 20 24.5 27 27.5 9 3 6 8 4.5 20.5 15.5 17.5 19.5 16 25 27 29.5 30 9 3 6 8 4.5 20.5 15.5 17.5 19.5 16 32 30.5 33 33.5 10 4 7 9 5.5 21.5 15.5 18.5 20.5 17 40 35 37.5 38 14.5 8.5 11.5 13.5 10 23.5 19 20.5 22.5 19 50 40.5 43 43.5 17 11 14 16 12.5 28.5 22.5 25.5 27.5 24 63 47.5 50 50.5 17 11 14 16 12.5 28.5 22.5 25.5 27.5 24 Operating Range Auto switch model Bore size (mm) 20

AC Servo Motor Driver (Network card type ）

2 to 10 AWG20 2 21/0.18 34.6 or less 1.35 4.7 0.1 HRZFEV-A(CL3) AWG20 2 cores LE-CSB-SB 2 to 10 Lock cable LE-CSB-RA 2 to 10 Note 5) or less 1.37 4.5 0.3 (Note 4) RMFES-A(CL3X) AWG20 2 cores LE-CSB-RB 2 to 10 AWG20 2 110/0.08 39.0 Note 1. d is as shown below. d Conductor Insulation sheath 2.

Table of Contents

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Smooth Cylinder/Low Speed Cylinder

B A B A B A B A B A B A B A B A B A B A B Bore size 40 50 63 80 100 6 4 3.5 1.5 6 3 1 0 0.5 6.5 2 4 11.5 10 3 0 0 4.5 0 2 9.5 8 3.5 1.5 5.5 3 1 0 0.5 6.5 2 4 11.5 10 3.5 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 3 5.5 4 2.5 3 9 4.5 6.5 14 12.5 1.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 9 7 6 6.5 4.5 8 10 17.5 16 4.5 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 8 10.5 9 7.5 8 14 9.5 11.5 19 17.5 6.5 6.5

Tie-rod Type Hydraulic Cylinder

38 6.5 118 118 90 35.5 35 27 19 27 14 34 35 100 125 34 80 15 100 250 16 112 170 M14 x 2 M27 x 2 38 6.5 140 140 112 35.5 35 27 19 27 16 34 35 100 160 43 100 17 110 279 18 140 197 M16 x 2 M33 x 2 42 9 174 174 140 45 38 36 22 28 18 38 40 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57

1

Construction ZZ CXW 20/32 M L A 10 ZZ 15, 16, 25 (mm) A (Max.)

Air Cylinder

10 (12) M5 x 0.8 18 15.5 40 13 14 8 12 2 5.5 6 28 35 5 26 M4 x 0.7 5 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 44 17 16.5 10 14 2 5.5 7 32 40 6 31 M5 x 0.8 5.5 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 53 17 20 12 18 2 6.6 7 38 40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Standard stroke range (mm) Long stroke range (mm) A H H1 I J K KA MM NA P TA ZZ AL B1 C D E S TB F GA GB 24 20 25 32 40 50 63 80 100 15.5 19.5 19.5 27 32 32 37 37 8 10 12 16 20 20 25 30 26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 14 16.5 20 26 32 38 50 60 5 6 6 8 11 11 13 16 5 5.5 5.5 6 7 7 10 10 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 10(12) 35 40 40 50 58 58 71

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style A Without auto switch B P A B P Q Q With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 5 st 10 st 5 st 10 st 20 st 5 st 10 st 20 st 20 st 20 st 20 st 5 st 10 st 32 40 50 Rc 1/8 40 46.5 M5 x 0.8 11.5 11 50 56.5 28 34.5 38 44.5 Rc 1/8 Rc 1/8 Rc 1/4 10.5 11 10.5 50 56.5 68.5 10.5 11 10.5 60 66.5 68.5 43 49.5 50.5 33 39.5 40.5 78.5 10.5 88.5 60.5 50.5 Rc 1/8