0.01

Dimensions SFD100 different diameters SFD200 different diameters One-touch fitting dimensions(A, B) One-touch fitting dimensions(A, B) Port size q Port size w Port size q Port size w 4 8 4.5 5.5 SMC 6 10 Basic dimension 114.5 Basic dimension 72 5.5 4.5 Fitting dimension A Fitting dimension B Fitting dimension A Fitting dimension B 8 12 5.5 5 Total length 81 (A + 72 + B) 76.5 (72 + A) 81.5

Table of Contents

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

Size: 1/2, Thread: G, Port Size: 1/4, Accessory: None, Option 1: Metal Bowl w/Level Gauge, Option 2: -

Table of Contents

a 2 port solenoid valve is connected to the right: When 2 air catch sensors are connected or when a 2 port solenoid valve is connected to the left: Joint bracket ISA-3-A Lead wire with connector (Individual wiring type) ISA-8-A ISA-8-B Bracket ISA-4-A DIN rail mounting bracket ISA-9-A Straight, 5 m A pair consists 1 set.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

10 4 6 8, 10 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 180 230 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Effective area (mm2) Note) Flow rate values are at a pressure of 0.5 MPa and a temperature of 20C.

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS12 0-M5-T M5 x 0.8 8 9 M5 x 0.8 9 4.5 10 31 10.3 0.7 28.4 AS12 0-U10/32-T 10-32UNF 10-32UNF AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

-N02-ST NPT 1/4 17.5 NPT 1/4 AS220-F02-ST G 1/4 AS220-02-ST Rc 1/4 17 18 R 1/4 72 19.5 7 27.2 40.2 17.5 1.5 36.7 AS320-N02-ST NPT 3/8 NPT 1/4 AS320-F02-ST G 3/8 AS320-02-ST Rc 3/8 19 22.5 R 1/4 123 24.3 9.5 30 54.8 21.9 1.5 49.3 AS320-N03-ST NPT 3/8 NPT 3/8 AS320-F03-ST G 3/8 AS320-03-ST Rc 3/8 19 22.5 R 3/8 128 24.3 9.5 30 52.6 19.7 1.5 47.4 AS420-N04-ST NPT 1/2 23.8 NPT 1/2 AS420-F04-ST

PFxx-OMJ0005CN

2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

cm or more) p6 p5 Accuracy [%F.S.] p4 p3 The piping on the IN side must have a straight section of piping with a length of 8 cm or more.

PFxx-OMO0004CN

8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J () ZS-

PSxx-OMM0002CN

Mpa A 0.8[V]3.2[mA] -51No.PS-OMM0002CN-F Z/ISE80(F)-02/N02/F02/C01/A2/B2/-* 5 4 5 -C01Rc1/8 -F02G1/4 -B2TSJ1/4 -A2URJ1/4 -52No.PS-OMM0002CN-F Z/ISE80(F)-02L/N02L/C01L/A2L/B2L/-* 4 5 5 -C01LRc1/8 -A2LURJ1/4 -B2LTSJ1/4 -53No.PS-OMM0002CN-F () ZS-24-A A () ZS-24-D A -54No.PS-OMM0002CN-F () ZS-35-A -55No.PS-OMM0002CN-F ZS-35-C 36 x n +4 x (n -1) -56No.PS-OMM0002CN-F ZS-35-B 36

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1/4 Rear ported Bottom ported TSJ1/4 With bracket Note) Input/Output N P A B R T S V

Plate Cylinder

8 !4 !1 r !0 !2 w y e u t !6 i o !7 B !3 B section MU25 Spring extend w i !0 o !8 t !5 q !7 r e u !1 !2 !6 y !4 A B !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

High-Precision Digital Pressure Switch

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

MU

8 contained in one kit, and can be ordered using the kits number for each cylinder bore size. 2.4-11 Series MU Basic Spring return Spring extend MUB25SMU25, #9 MUB32SMU32, #9 MUB40SMU40, #9 MUB50SMU50, #9 MUB63SMU63, #9 Spring return MUB25SMU25, #8 MUB32SMU32, #8 MUB40SMU40, #8 MUB50SMU50, #8 MUB63SMU63, #8 (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42