ZP 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.
ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.
(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.
Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
Qmax 55.5 C = Qmax: Max. suction flow rate L/min (ANR) C: Conductance [dm3/(sbar)] Front matter 14 Model Selection 7 Vacuum Equipment Selection Example #Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
Standard Combinations Components Regulator with Built-in Pressure Gauge ARG Filter Regulator with Built-in Pressure Gauge AWG Combination Model Port size Air filter AF Lubricator AL Mist separator AFM AF + ARG + AL ACG20 ARG20 AF20 AL20 1/8, 1/4 ACG30 ARG30 AF30 AL30 1/4, 3/8 ACG40 ARG40 AF40 AL40 1/4, 3/8, 1/2 AWG + AL ACG20A AWG20 AL20 1/8, 1/4 AWG30 ACG30A AL30 1/4, 3/8 AWG40 ACG40A AL40
Model AC10*-A AC20*-B AC25*-B AC30*-B AC40*-B AC40*-06-B AC50*-B AC55*-B AC60*-B Port size M50.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 Gauge port size Note 1) 1/16 1/8 Fluid Air Ambient and fluid -5 to 60 (Should be no freezing) temperature Note 2) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Set pressure range 0.05 to 0.7 MPa 0.05 to 0.85 MPa Filtration / Air filter 5
(4 sets) U side SS5V1-16S3CD-06B-C6 1 set (manifold part no.)
TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.
(1 set) SV1200-5FU (2 sets) Single solenoid SV1100-5FU (4 sets) SS5V1-16PD1-06B-C6 . 1 set (manifold part no.)
for the locking type. ( ) 4(A) port side: Orange 2(B) port side: Green 4 x 5.3 (For mounting) L2 5 (Rail mounting hole pitch: 12.5) With option L1 (Station n) (Station 1) Light/surge voltage suppressor 58.4 3/5 3/5 E E 4 A 4 A 4 A 4 A 101.2 2 B 2 B 2 B 2 B P 1 P 1 5 5 3 E 1 P 3 E 1 P 82.7 63.8 75 1 1 1 1 Individual SUP spacer 12 Individual EXH spacer (10) (For DIN rail mounting) 14.7 L Dimension
HRX-OM-X037 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.
HRX-OM-Y098 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.
HRX-OM-W060 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.
DOC1001322 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures. 1
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) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (
Pilot port 1/8, 1/4 (Rc, NPT, G) OFF response time: 45%1, 2 reduction IN port 3/4, 1, 1 1/2 (20A, 25A, 40A) Fluid temperature: 40 to 60C Steel tube piping Can be used in a wide range of temperatures OUT port 3/4, 1, 1 1/2 (20A, 25A, 40A) Easier maintenance Flow rate characteristics: 40%1, 2 increase The springless diaphragm allows for easy maintenance of the valve.
3 @1 #1 #3 #2 u o @9 e r @6 @4 !1 CHA Related Products DParts List Replacement Parts: Seal Kit Description Material Note Bore size (mm) Seal kit no. Content No.