DOC1001322

For a facility with a large installation area that can vent the air naturally: Make an air outlet on a wall at a high level and air inlet on a wall at a low level, to allow for adequate airflow. 2. For a facility with a small installation area that cannot vent the air naturally: Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level. 3.

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Vacuum Pad

P P For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item.

Vacuum Pad

P P For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item.

Vacuum Pad

P P For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item.

Min. Dripping Flow Rate(l/min): 50, Oil Storage Capacity(cm³): 135, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1/2, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 40, Accessory: With Bracket

Body Size: 40, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 04 (1/2), Mounting: B (Bracket), Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Min. Dripping Flow Rate(l/min): 40, Oil Storage Capacity(cm³): 135, Case: [Metal] Metal case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 3/8, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 3/8, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 40, Accessory: Without optional mounting

Min. Dripping Flow Rate(l/min): 50, Oil Storage Capacity(cm³): 135, Case: [Metal] Metal case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1/2, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1/2, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 40, Accessory: Without optional mounting

Min. Dripping Flow Rate(l/min): 50, Oil Storage Capacity(cm³): 135, Case: [Metal] Metal case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 3/4, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 3/4, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 40, Accessory: Without optional mounting

Body Size: 40, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1/4, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 40, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 1/4, Mounting: Bracket, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 40, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 3/8, Mounting: Bracket, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 40, Thread: G, Port Size: 3/8, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 40, Thread: G, Port Size: 1/2, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 40, Thread: G, Port Size: 1/2, Mounting: Bracket, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 40, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 04 (1/2), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: R (Flow Direction: Right to Left), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 40, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 03 (3/8), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: R (Flow Direction: Right to Left), Semi-Standard, Body Size 30, 40, 50 & 60: Standard