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VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

AC

Note 2) Without valve mechanism Option Combinations Combinable Impossible Depends on the model Applicable Filter Regulator Option Auto drain Symbol AW4000 Description AW1000 D D C 1 2 6 8 C J N R W AW2000 AW3000 D D C 1 2 6 8 C J N R W Auto drain pressure differential style Auto drain float style (N.O.)

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R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

-LM plug connector (M): DIN terminal (D, Y): SY9 40(R)-WO3 4 5 M8 connector (WO): VFR 3 4 5 3 4 5 3 4 5 D Y SY9 40(R)SY9 40(R)-M03 04 03 04 03 04 03 04 VQ7 Applicable cable O.D. 3.5 to 7 109.2 101.7 75.4 [82.4] Max. 10 202.3 64.9 90.4 (Lead wire length) 60 75.4 Approx. 300 79.9 M8 x 1 (Lead wire length) Approx. 300 86.5 [93.5] 62.4 Pg7 113.5 29.5 29.5 29.5 29.5 29.5 29.5 29.5 29.5 120 184.1

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Nil Rc Thread type Available Not available Depends on model Accessory/Option Combinations F G N NPT D J T AM150 R AM250 AM350 AM450 Applicable model Accessory Option specifications C C D -J -R Accessory (Option) AM550 AM650 AM850 N.C. auto-drain Port size Accessory N.O. auto-drain 01 B 06 B 1 8 3 4 1B 1 4 Drain guide B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Option IN-OUT reversal direction -T

V

(Except for 110VAC) C O I L V O LTA G E With indicator light and surge voltage suppressor. } 3 110VAC 5 24VDC 6 12VDC VVQ0-P-4-C4 I N D I V I D U A L SUP S P A C E R VVQ0-57A-4 DIN R A I L M O U N T E D B R A C K E T [-D] VVQ0-R-4-C4 I N D I V I D U A L EXH S P A C E R ACCESSORIES MANIFOLD OPTIONS 23 04 06 08 01 03 B U I LT I N S I L E N C E R, D I R E C T E X H A U S T [-S] 1 N A M E P L

Proposals for Energy Saving

-100 KN-04-150 KN-06-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 D H2 H1 L2 L1 Nozzle with male thread/KN (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R

CG5-S

10 -04 R 1/2 R 3/8 -03 <R type> KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.

Air Fittings & Tubing

Thread R(PT) Weight (g) M D L1 L2 Part No.

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D. Applicable tube O. D.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

ZP3

w q ZP3 T N 04 B5 e Connection thread (Female thread) M5 x 0.8 Width across flats D B5 M5 x 0.8 5 Model A B C2 D Vacuum inlet direction q Pad dia.

VFS

3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

A

D E R S E R I E S ADH 4000 H E A V Y A U T O D R A I N S Y M B O L S ADH4 00 04 T H R E A D .Rc(PT) N .NPT M A X.

SY

20 20 stations D R Includes the number of blanking plate assemblies.

A

1 3 O P T I O N S E R I E S N C Y 2 Bore Size (mm) 6 ~ 40 Fluid Air Piston Speed 7 ~ 50mm/s H O W T O O R D E R S E R I E S NCY2 B A S I C T Y P E A I R H Y D R O R O D L E S S C Y L I N D E R O P T I O N H O W T O O R D E R S E R I E S NCY2 S L I D E R T Y P E A I R H Y D R O R O D L E S S C Y L I N D E R O P T I O N X116 NC(D)Y2 S X116 NCY2 B S W I T C H B O R E S I Z E S T R O K E ( I

V100

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Description Manifold block assembly q For D side P/R port with One-touch fitting for 6 For U side P/R port with One-touch fitting for 6 VZ1000-2A-2D SUP/EXH block assembly D side w VZ1000-2A-2U SUP/EXH block assembly e DIN rail End block assembly End block assembly VZ1000-3A-1D For D side For U side Without D-sub connector For indicated location, P/R port with One-touch fitting for 6 r VZ1000