Description Material Note Body A PBT Elbow body PBT No.
Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass
4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !7 POM o POM Valve seat (B) 5-6-36 5 Port Mechanical Valve Metal Seal Series VZM400 Series VZM400 Basic VZM450-01-00 JIS Symbol Accessory mounting hole (Pilot exhaust port) SA VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2.0 mm O.T. 2-3.5 mounting hole 3.0 mm T.T.
] 0.5 [2 (A) 3 (R) ] bar) ) b 0.2 [1 (P) 2 (A) ] 0.15 [2 (A) 3 (R) ] Rc, NPT, G1/8 ON Delay 480g (*) 4 4 V R 2 1 1 0 01 01 Rc 1/8 N01 NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2
) ( ): Fluid: CO2 Calibration certificate Flow adjustment valve None With calibration certificate Nil A Nil S None Yes The certificate is written in English and Japanese. Other languages are available as specials.
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)
Body Size: 20, Thread: N (NPT), By-Pass Port Size: 01 (1/8)
Body Size: 20, Thread: Rc, By-Pass Port Size: 01 (1/8)
Body Size: 20, Thread: N (NPT), By-Pass Port Size: 02 (1/4)
Body Size: 20, Thread: Rc, By-Pass Port Size: 02 (1/4)
Body Size: 20, Thread: F (G), By-Pass Port Size: 02 (1/4)
Type: Standard, Main Body Shape: Straight, Body Material: PBT, Seal Material: Others, Input Side, Port Type P: Built-in cartridge, Output Side Port Type A: Built-in cartridge, Effective Sectional Area(mm2): 28, Effective Sectional Area (Range)(mm2): Up to 30, Connection Dia.: 1/8, Types of Screw: Rc
Type: Standard, Main Body Shape: Straight, Body Material: PBT, Seal Material: Others, Input Side, Port Type P: Built-in cartridge, Output Side Port Type A: Built-in cartridge, Effective Sectional Area(mm2): -, Effective Sectional Area (Range)(mm2): Up to 30, Connection Dia.: 1/4, Types of Screw: Rc
Type: Standard, Main Body Shape: Straight, Body Material: PBT, Seal Material: Others, Input Side, Port Type P: Built-in cartridge, Output Side Port Type A: Built-in cartridge, Effective Sectional Area(mm2): 28, Effective Sectional Area (Range)(mm2): Up to 30, Connection Dia.: 1/4, Types of Screw: G
Type: Standard, Main Body Shape: Straight, Body Material: PBT, Seal Material: Others, Input Side, Port Type P: Built-in cartridge, Output Side Port Type A: Built-in cartridge, Effective Sectional Area(mm2): 28, Effective Sectional Area (Range)(mm2): Up to 30, Connection Dia.: 1/8, Types of Screw: NPT
Type: Standard, Main Body Shape: Straight, Body Material: PBT, Seal Material: Others, Input Side, Port Type P: Built-in cartridge, Output Side Port Type A: Built-in cartridge, Effective Sectional Area(mm2): 28, Effective Sectional Area (Range)(mm2): Up to 30, Connection Dia.: 1/4, Types of Screw: NPT
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-89 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)