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&snac INSTRUCT ION MANUAL ( | D X o M B o 3 o ) I D G 3 , I I D G 3 M , I I D G 3 V , I I D G 5 , I r r ^ n r , I D G s M ' l I V I U U E . L I D G s V , I 7\cau t i on0 p e r a t i o n f M a k e s u r e t o o p e r a t e l { i t h i n s o e c i f i c a t i o n s . ( R e f e r t o p . ?

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(-D) [ ]: AC When P, R port outlets are indicated on the D side, the P, R ports on the opposite side are plugged.

Made to Order

D-H7BA D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C80 D-H7 D-H7W D-H7NF D-H7BA D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-C7 D-C80 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B64 D-B59W D-A9(V) Bore size (mm) Bore size (mm) B 24 (32) 24 (32) 25 (33) 27 (36) 32 (36) B 20 (28) 20 (28) 21 (29) 23 (32) 28 (40) A A 21.5 (29.5) B 20.5 (28.5) A B 15.5 (22.5) A B 17.5 (25.5) A B 19.5 (27.5

Table of Contents

Note 2) V, S and R specifications are 45T, 45T1.

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Battery-less

option S Dust-protected1 Cable Motor In-line motor type/D type Cable Table D Motor i Mounting2 o Actuator cable type/length Robotic cable [m] Nil None R8 83 R1 1.5 RA 103 R3 3 RB 153 R5 5 RC 203 Symbol Mounting R type L type D type Nil Without side holder V V H With side holder (4 pcs.)

ZP

R D A6 M Applicable tubing O.D.

Electric Actuator/Slider Type

Auto Switch Direct Mounting Style D-M9NW(V)/D-M9PW(V)/D-M9BW(V) RoHS Refer to SMC website for the details about products conforming to the international standards.

Rotary Actuator

For the angle adjusting type, angle adjusting screws are mounted to the left cover. of e g k n e ra y w n a io y Angle adjusting screw Angle adjusting screw at 1 ot 8 0 n R io ct e r di g in st u dj n A o a n ti g c e e l e gl ir d a n d g A j u n s ti ti s n u g j d a d ir e e R R l g c 0 0 n ti ot ot o A 8 8 n 1 1 at at y y io io a a n n w w r r y y a a e e n n k k g g of of e e Angle

Rotary Actuator/Vane Type

The length is 24 when any of the following are used: D-90/90A/S99(V)/T99(V)/S9P(V) The length is 30 when any of the following are used: D-97/93A The length is 25.5 when the D-M9 is used. *2.

Table of Contents

90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

The length is 24 when any of the following auto switches are used: D-90, D-90A, D-S99(V), D-T99 and D-S9P(V). The length is 30 when any of the following auto switches are used: D-97 and D-93A 2. The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97 and D-93A. The angle is 69 when any of the following auto switches are used: D-S99(V), D-T99(V) and D-S9P(V).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

SV

0 V 0 V 24 V G D G D SI unit SI unit Master unit D 0 V24 V G D 0 V24 V G D 0V 24V G D 0V 24V L2 L1 G LINE1 LINE2 SHIELD L1 L2 Power supply 24 V 0 V 0 V 24 V SHIELD SHIELD Transmission line L1 L2 FG 24 V 0 V L1 L2 FG 24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Crimped connector SL-J1A Power supply 24 V 0 V 0 V 24 V Type 3 ground Type 3 ground

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3E-GUMl V V V V V V V ZP3E-GBMl V V V V V V V r Flat type with groove r Bellows type with groove Note 1) G in the table indicates the pad diameter. Note 2) l in the table indicates the pad material. 472 A Component Part No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

12 125 140 160 63 80 100 50 16 20 25 32 40 D-A7(H)(C) D-A80(H)(C) D-A9(V) D-Z7 D-Z80 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V)L D-F7NTL D-F79F D-F9(V) D-F9W(V) D-F9BA(V)L D-Y59 D-Y69 D-Y7P(V) D-Y7W(V) D-Y7BAL D-P5DW 13 13 13 12 12 13 10 10 12 12 12 12 11 11.5 9 11.5 9.5 9.5 9.5 14 14 14 15 15.5 CUJ 6 9 9 8.5 6.5 6.5 7 6 5.5 6 5.5 5 6 CU CQS 5.5 6.5 5.5 6.5 5.5 5.5 CQM CQ2 11.5 11.5 11.5 12

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

CJ2

D-F7BAVL Auto switch model D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A7 D-A80 D-A79W Bore size (mm) A 2.5 3 B 2.5 3 A 1.5 2 B 1.5 2 A 3 3.5 B 3 3.5 A 3.5 4 B 3.5 4 A 0.5 1 B 0.5 1 10 16 Auto Switch Mounting Height D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F D-C7/C80 D-H7/H7W D-H7NF D-H7BAL Auto switch model D-F7V D-F7WV D-F7BAVL D-C73C D-C80C D-H7C D-A7 D-A80 D-A73C D-A80C

V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

Vacuum Unit

Note Example Symbol Type E J K L P W Nil Without option V V V V B With DIN rail mounting bracket4 V V V V ZK2C10R5NC1A-08 ZK2C07R5NC1A-08 D With common release pressure supply (PD) port V V V 5 V Cannot be selected ZZK204A-A1P-B when r is N L Manifold individual supply specification V V V 5 V Individual supply port 1 2 3 Stations D side U side 3 When more than one option is selected