Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

2

44.4 9.5 25.1 1/2 KQ2L13-U04l 22.23 19.3 17 21.8 31.9 32.9 17 56 44.4 9.5 56 * l/A: Brass, N: Brass + Electroless nickel plated * Reference dimensions after installation of Uni thread Note) D1 is maximum diameter.

Made to Order

2 pcs. 1 pc. n pcs.

A

N C Q 2 / C Q 2 M5 0.8 M6 1 M8 1.25 Flange Double Clevis** Bore Size (mm) Foot* M10 1.5 (N)CQ-F012 (N)CQ-D012 12 (N)CQ-L012 (N)CQ-F016 (N)CQ-D016 16 (N)CQ-L016 (N)CQ-F020 (N)CQ-D020 20 (N)CQ-L020 (N)CQ-F025 (N)CQ-D025 25 (N)CQ-L025 (N)CQ-F032 (N)CQ-D032 32 (N)CQ-L032 (N)CQ-F040 (N)CQ-D040 40 (N)CQ-L040 (N)CQ-F050 (N)CQ-D050 50 (N)CQ-L050 (N)CQ-F063 (N)CQ-D063 63 (N)CQ-L063 Note) * If Foot

Hydraulic

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

Table of Contents

Same side Same side Different sides Different sides D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 60 15 10 15 + 50 ( n 2) (n = 2, 4, 6) Mounting D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 2 65 + 50 (n 2) 65 15 10 Warning 15 + 50 ( n 2) (n = 2, 4, 6) 15 75 2 10 1. Do not rotate the cover.

Table of Contents

98.1 N 147.1 N 245.2 N 392.3 N -X Place the center of gravity of the load and center of the slide unit close during operation.

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

Table of Contents

69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136) 17.5 23 39 45.5 3 4 VXD2150 VXD2260 1 VXD2152 VXD2262 36.5 133 (150) 20

5

(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7 D-H7W D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-B5 D-B64 D-G5 D-K59 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 10 20 75 20 + 50(n 2) 2 (n = 2,