Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover)

energy saving effect

Applicable model Minimum operating flow rate [L/min] To circulating fluid outlet r t HRSH100-20 w HRSH150-HRSH200-HRSH250-W25 r q HRS-BP005 y HRSH250-AHRSH300-A40 To circulating fluid return port r t u r e Parts List No.

240

6N q w e r t y u i o !

Series: 25A-ZSE20, Rated Pressure Range: AF (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection

3

VX2 24 VDC GDM2A-G-S5 100 VAC VXK 110 VAC 200 VAC VXD None 220 VAC GDM2A-R 230 VAC VXZ 240 VAC 24 VAC VXS VXS 48 VAC 24 VDC GDM2A-G-Z5 100 VAC GDM2A-R-L1 110 VAC GDM2A-R-L1 200 VAC GDM2A-R-L2 220 VAC GDM2A-R-L2 230 VAC GDM2A-R-L2 240 VAC GDM2A-R-L2 24 VAC GDM2A-R-L5 48 VAC GDM2A-R-L5 VXB VXE With light VXP VXR VXH VXF Gasket Part No. for DIN Connector VCW20-1-29-1-F VX3 VXA Bracket Assembly

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

SFOD-OMT0009CN

/ CIR-L Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 1)CIR-R CIR-L 2 3 4 (5) SYN-I Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 SYNI 100 100.00 1000 1000 0.0 0.0 0.5 2 SYNI 0.0 0.0 0.5 0 3 SYNI 0.0 0.0 0.5 4 SYNI 0.0 0.0 0.5 55 No.SFOD-OMT0009CN-B 8. 8.1 () ... 1 ...(2) () M

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 () () 1) CIR-R CIR-L 1 2 34 (5) SYN-I Area 1 Step No.

Precision Regulator

1/4 to 1/2 Port size IR IR 66 IRV 36 Female thread for bottom mounting 4 x M5 x 0.8 depth 7 VEX Bottom bracket is not available as an option.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

High Pressure Coolant Valve

(284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40

CRJ

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.

High Power Cylinder Series RHC

x 0.8 x 6 25, 32: M6 x 1 x 6 40: M8 x 1.25 x 8 Nickel plated Chromium molybdenum steel Hexagon socket head cap screw 15 Nickel plated 20, 25: M5 x 0.8 x 6 32, 40: M6 x 1 x 8 Chromium molybdenum steel Hexagon socket head set screw 16 Label 17 Special resin Cushion seal 18 NBR Piston seal 19 Replacement parts: Seal kits Resin Wear ring 20 NBR Piston gasket Bore size (mm) Seal kit no.

VNH

A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter + Front Protection Cover, Operation