Bore Size: 20mm, Piping: Standard, Stroke: 200mm, Stroke Adjustment Unit: Left: w/o Unit; Right: w/o Unit, Option: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 20mm, Piping: Centralized Piping, Stroke: 200mm, Stroke Adjustment Unit: Left: w/o Unit; Right: w/o Unit, Option: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 3m, Number: -

Guide Suffix: HT (Linear Guide, Double Axis), Bore Size: 40mm, Stroke: 300mm, Stroke Adjustment Unit: H (Left Side Stroke Adj., w/High Load Shock Absorber; Right Side Stroke Adj., w/High Load Shock Absorber), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Guide Suffix: Linear Guide, Double Axis, Bore Size: 40mm, Stroke: 300mm, Stroke Adjustment Unit: Left Side Stroke Adj., w/High Load Shock Absorber; Right Side Stroke Adj., w/High Load Shock Absorber, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m

PFxx-OMO0004CN

2No.PF-OMO0004CN-E / 1 1.5 *3) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB 7 A*8 201 2~200L

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

LFE-OMZ0013

Sub screen 20L/min 100L/min 200L/min Press the or button to select the sensor to be connected. Press the button to confirm. Return to function selection mode. [F 0] Sensor selection is completed. -21No.LFE*-OMZ0013 [F 1] Setting of OUT1 Set the output mode of OUT1.

HEC-OM-S019

HEA Series (see section 2.5) 1 Safety Instructions Continued Insulation resistance 50M or more (DC500V) Constant temperature air flow rate 20 to 200L/min(ANR) Over current protection 10A circuit protector Inrush current 20A or less (100V) Pollution degree Pollution degree II Fluid Compressed air Current consumption Max.3A (100V) Port size IN/OUT: Rc1/4 Indication temp. range -9.9 to 60.0

IP80-OM00019

./ 80L/min(ANR)(SUP=0.14MPa) *3 200L/min(ANR)(SUP=0.4MPa) 5L/min(ANR)(SUP=0.14MPa) *3 11L/min(ANR)(SUP=0.4MPa) 2080() 2060( ExdBT5) ExdBT5(TC15916) A A Rc1/4 1/4NPT G1/4 Rc1/8 A G1/2M20X1.51/2NPT G1/2 2.6kg 2.4kg JISF8007 IP65(IEC Pub.529) *11/21/2%F.S.

ELECTRO-PNEUMATIC POSITIONER

*1 Input resistance 23515 (420mADC) Supply air pressure 0.140.7MPa Standard stroke 10 85mm (External lever allow-able runout angle 10 to 30) 60 to 100*2 Sensitivity Within 0.1%FS Within 0.5%FS Linearity Within 1%FS Within 2%FS Hysteresis Within 0.75%FS Within 1%FS Repeatability Within 0.5%F.S Thermal coefficient Within 0.1%F.S/oC Output flow rate *3 80L/min (ANR) or more (SUP=0.14MPa) 200L

AIR COMBINATION

{For example, in case of two auto drain, the compressor need the capacity over 1.5kW [200L/ min (ANR)].} Operating pressure: 0.1MPa or more at min.. N.C. type auto drain should be used under the following requirements to avoid operating failure. Operating pressure: 0.1MPa or more at min. for AD17-A and AD27-A, 0.15MPa or more at min. for AD37-A and AD47-A.

FILTER REGULATOR

If multiple auto drains are used, confirm used compressor has capacity over the result of multiplying the above capacity and the number of used auto drains. { For example, in case of two auto drain, the compressor need the capacity over 1.5kW [200L/min (ANR)]. } Operating pressure: 0.1MPa or more at min..

AIR COMBINATION

{For example, in case of two auto drain, the compressor need the capacity over 1.5kW [200L/ min (ANR)].} Operating pressure: 0.1MPa or more at min.. N.C. type auto drain should be used under the following requirements to avoid operating failure. Operating pressure: 0.1MPa or more at min. for AD17-A and AD27-A, 0.15MPa or more at min. for AD37-A and AD47-A.

MIST SEPARATOR

{For example, in case of two auto drain, the compressor need the capacity over 1.5kW [200L/min (ANR)].} Operating pressure: 0.1MPa or more at min.. N.C. type auto drain should be used under the following requirements to avoid operating failure. Operating pressure: 0.1MPa or more at min. for AD27-A, 0.15MPa or more at min. for AD37-A and AD47-A.

Table of Contents

Table specification Grease for dust seal application With dust seal Fluorine grease for vacuum equipment made by NOK Kluber Traveling distance of 4000km, 4 million reciprocations, or operation period of 6 months, whichever comes first Grease maintenance schedule Rc 1/4, one each on both axial surfaces Seal the unused port with a plug, suction at both ends Vacuum suction port 100l/min (ANR) 200l

Electric Actuators

Table specification Grease for dust seal application With dust seal Fluorine grease for vacuum equipment made by NOK Kluber Traveling distance of 4000km, 4 million reciprocations, or operation period of 6 months, whichever comes first Grease maintenance schedule Rc 1/4, one each on both axial surfaces Seal the unused port with a plug, suction at both ends Vacuum suction port 100l/min (ANR) 200l

LJ1H

Table specification Grease for dust seal application With dust seal Fluorine grease for vacuum equipment made by NOK Kluber Traveling distance of 4000km, 4 million reciprocations, or operation period of 6 months, whichever comes first Grease maintenance schedule Rc 1/4, one each on both axial surfaces Seal the unused port with a plug, suction at both ends Vacuum suction port 100l/min (ANR) 200l

AC

Because 2 auto drains are used and 200l/min air is needed, it might malfunction with a compressor weaker than the required ability. AC2000 Rc(PT)1/4 AC5000 Rc(PT)3/4 AF AR IR Caution VEX qIn case of mounting a regulator in up right direction, no pressure switch(IS1000M-) attachment or T type interface can be mounted, for it touches bonnet.

IR1000/2000/3000

CAT.E611B Precision Regulator Series IR1000/2000/3000 PAT.PEND The addition of the small size Series IR1000 and the large size Series IR3000 provides an increased range of flow rates from approx. 200l/min. to approx. 6000l/min.

Electro-Pneumatic Positioner

./0.01MPa MPa 80l/min (ANR) or more (SUP = 0.14MPa) SMC Output flow Lock screw (Hexagon 1.5) 200l/min (ANR) or more (SUP = 0.4MPa) MPa 5l/min (ANR) or less (SUP = 0.14MPa) Air consumption 11l/min (ANR) or less (SUP = 0.4MPa) Ambient and fluid temperature 20 to 80C (Non-explosion proof) 20 to 60C (Flame proof and explosion proof) Explosion proof construction Flame proof and explosion proof