MXQ

-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20-30 MXQ20-125 MXQ20-125 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20

Table of Contents

) 1 7 240 VAC, 50/60 Hz 9 Other 12 (32A) 1 4 1 14 (40A) 1 2 1 VP470 Option Note) There is no 3 position type for Series VP470.

Air Slide Table Series MXQ

-150 MXQ20-125 0.08 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-40 MXQ20-50 0.12 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 0.06 Table displacement mm Table displacement mm Table displacement mm 0.06 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-50 MXQ20-50 MXQ20-30 MXQ20-100 MXQ20-150 0.08 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-100 MXQ20-20 MXQ20-10 0.04 0.02 MXQ20-10 0.02 0 0 400 500 600 100 200 300

MX-OMP0051

A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43 MXQ25(A) MXQ20B M141.5 69 11 (MPa) (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3 MXQ16(A) 0.2 MXQ16B 0.2 MXQ20(A) 0.2 MXQ20B 0.2 MXQ25(A) 0.2 MXQ8(A,C) MXQA-A887 MXQ8B MXQB-A887 MXQ12(A,C) MXQA-A1287 MXQ12B MXQB-A1287 MXQ16(A) MXQA-A1687 MXQ16B MXQB-A1687 MXQ20(A) MXQA-A2087 MXQ20B MXQB-A2087 MXQ25(A) MXQA-A2587

AIR SLIDE TABLE

M61 7.4 7 12 MXQ16B M61 7.4 10 15 MXQ20B M81.25 18 14 20 MXQ8C M40.7 2.1 6 9 MXQ12C M50.8 4.4 8 12 Caution Types other than MXQ20(A) and MXQ25(A) have through tapped hole Use the bolt shorter than max. screw depth (L2) by 0.5mm or more.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

VXD

Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

Slide Tables MX Series

Shock absorber RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 4.Follow the table for tightening torque of shock absorber lock nuts.

VN-OMP0002

411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4 5 , 6 7 8 9 10 11 P2N.C.

JXCx-OMU0004

[7] ALARM OFFRESET OFF STOP ON OFF OFF [8] IN013 ON 11 2 OUT0 ON OFF [9] BUSY ON [10] BUSY ONIN013 OFF bit_0 OFF ON OUT1 bit_1 [11] BUSY OFFOUT0 13 ON OUT2 ON OFF bit_2 [12] OUT013 ONIN13 ON10 OUT3 ON OFF bit_3 [13] BUSY ON OUT0 1 OFF ON BUSY 3 OFF [14] BUSY ONIN13 OFF OFF ON ALARM [15] BUSY OFFOUT1 3 ON 0 49 No.JXC-OMU0004-A 10. 10.1 LEF LEF LEFB LEFS 16,25,32 16A 16B 25H 25A

JXCx-OMT0023

Driver Inrush currents (A0-P) Main circuit power supply (L1 L2) Control circuit power supply (+24V 0V) LECSA2130A (Attenuated to approx. 5A in 5ms) 25A (Attenuated to approx. 0A in 4 to 6ms) Since large inrush currents flow in the main circuit power supply, always use no-fuse breakers and magnetic contactors. (Refer to section 11.5.)

Programless controller Step motor (servo 24 VDC)

LEFB LEFS 16, 25, 32 common 16A 16B 25H 25A 25B Direction Motor side Return to origin Speed [mm/s] 60 30 Acceleration[mm/s2] 1000 Speed [mm/s] 48 10 5 20 12 6 Jog Acceleration[mm/s2] 1000 Inching Distance [mm] 5 1 LEFS 32H 32A 32B 40H 40A 40B Direction Motor side Return to origin Speed [mm/s] 30 Acceleration[mm/s2] 1000 Speed [mm/s] 24 16 8 30 20 10 Jog Acceleration[mm/s2] 1000 Inching Distance

3 Port Air Operated Valve Series SYJA300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

PA3145/3165/3185

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

V100

) 1 VQZ 04 06 10 12 14 20 VZ Option (32A) 1 4 1 (40A) 1 2 1 Coil rated voltage VS 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz JIS Symbol Internal pilot (50A) 2 VFN 4 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option How to Order Pilot Valve Assembly External pilot 00 VT3113 G 1 Coil rated voltage Electrical entry 1 2 3 100 VAC, 50/60 Hz 200

VP3145/3165/3185

) 1 VQZ 04 06 10 12 14 20 VZ Option (32A) 1 4 1 (40A) 1 2 1 Coil rated voltage VS 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz JIS Symbol Internal pilot (50A) 2 VFN 4 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option How to Order Pilot Valve Assembly External pilot 00 VT3113 G 1 Coil rated voltage Electrical entry 1 2 3 100 VAC, 50/60 Hz 200

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

VPA4

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

VP4

) 1 7 240 VAC, 50/60 Hz 9 Other 12 (32A) 1 4 1 14 (40A) 1 2 1 VP470 Option Note) There is no 3 position type for Series VP470.

Coolant Valve: Air Operated/External Pilot Solenoid VNC Series

CE-compliant Nil Q CE-compliant Note) Electrical entry: D or DZ only Manual override Valve size Valve type Port size Rated voltage Nil: Non-locking push type Nil Air operated Symbol Orifice diameter (mm) Symbol Port size Rc 1 2 4 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A