Bore Size: 25mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: L (Symmetric), Stroke: 20mm, Adjuster: w/o Adjuster, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 25mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: w/o Adjuster, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Symmetric, Stroke: 20mm, Adjuster: w/o Adjuster, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

energy saving effect

-A-20/40HRSH150-W-20/4025 25 Facility water temperature 32C Ambient temperature 32C 20 20 Cooling capacity [kW] Cooling capacity [kW] 15.7 15.7 15 15 Ambient temperature 43C 10 10 Facility water temperature 40C Ambient temperature 45C 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH200-A-20/40HRSH200-W-20/4030 30 Ambient

VXP21/22/23

Description Size Standard Brass BC6 Brass BC6 NBR Option Stainless steel Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless

3

Note 2) Analog 4 to 20 mA (Analog 4 to 20 mA) sensor Note) G, F, J: Made to Order Note 2) Analog 1 to 5 V (Analog 1 to 5 V) Reference: 1 [L/min] 0.2642 [gal/min] Note 2) Analog 4 to 20 mA (Analog 4 to 20 mA) 1 [gal/min] 3.785 [L/min] oF = 9/5oC + 32 Options/Part No. Lead wire Nil N When optional parts are required separately, use the following part numbers to place an order.

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

Pulse Valve

), 1 1/2 (40A) 3/4 (20A), 1 (25A), 1 1/2 (40A) 1 (25A) Dedicated Controller for Operation VXFC Series p. 14 The valve controller can turn the many valves for the dust controller ON/OFF .

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Fluoropolymer Piping Equipment

LQ3T2A-R1 1/4" 1/8" 1/4" 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2 LQ3T2A-R5 1/4" 1/8" 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 LQ3T3A-R1 20 25 4 LQ3T3A-R2 1/8" 3/8" 10 9 11 33.5 32.5 14 2 LQ3T3A-R5 3/8" 1/4" 22.5 19.5 17 16 21 16 47.5 44.5 38 37 25 20 4 LQ3T3A-R7 1/4" 1/4" 17 16 16 38 37 20 LQ3T3A-R9 1/4" 3/8" 1/4" 17 16 22.5 19.5 16 21 38 37 47.5 44.5 20

VNB

A: Non-locking extended type 4 Valve size 1 to 4 6A 8A 10A 1 8 1 4 3 8 5 6 24 VDC 12 VDC 1 7 B: Locking slotted type 7 240 VAC 50/60 Hz 9 Other 11 15 11 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 Nil: Non-locking push type 20A 3 4 Valve size 5 to 7 25 4 25A 1 22 11 4 32A 5 32 Electrical entry/ With light/surge voltage suppressor 1 B 22 32 28 40 6 28 40 1 4 32F Flange 11 2 40A GS Grommet

New

20 20 20 23 23 23 23 102 105 105 105 20 20 20 20 68.5 68.5 68.5 68.5 108 111 111 111 47.5 47.5 47.5 47.5 20 20 20 20 18 Series VXF2 Dimensions on the Mounting Side: Flange type VXF25B<<< VXF26B<<< 8 x M10 x 1.5 x 20 /C1 8 x M8 x 1.25 x 20 /C1 7 x 45o 7 x 45o 22.5o 22.5o A A A A 166p0.2 178p0.2 A-A A-A The surface roughness of the orifice machining should be Rz6.3 or less.

53

time 1 min 30 s 20 s Max.

Lightweight and Compact

min 30 s 20 s Max.

Proposals for Energy Saving

Compressor operation status Air consumption status Tubing, fittings Couplers Rubber hoses Other 20% 25% 30% 25% Flow rate Air leakage is equivalent to 20 to 50%.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

14 14 20 20 14 25 20 25 25 20 1/8" 1/4" 1/4" 1/8" 3/8" 1/4" 3/8" 3/8" 1/4" 1/2" 1/2" 3/8" 1/4" 1/2" 1/2" 3/8" 1/4" 3/4" 3/4" 1/2" 3/4" 3/4" 1/2" 3/4" 3/4" 1/2" 3/8" 1/4" 1" 1" 3/4" 1" 1" 1" 1" 1" 4 16 33.5 17 6 12 16 34.5 20 1/4" 19.5 22.5 44.5 47.5 21 25 19.5 44.5 22.5 21 47.5 25 3/8" 5 9 18 16 17 37 38 16 20 16 37 17 16 38 20 1/4" 22.5 24.5 50.5 52.5 24 29 19.5 16 19.5 16 19.5 22.5 17

Process Valve

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.