Low Profile Slide Table Series MXF

Model Maximum allowable load mass Average speed Va (mm/s) A2 10 11 12 17 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 0.6 1 2 4 Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Note) 16 mm for MXF8-10 only. 0.7 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model Stroke (mm) 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98 2.22 3.41 6.66

IZx-OMT0049

Note 3) 5P flashes. Note 4) Selected bar (high voltage power supply module) ION/HV to display is turned off.

Compact Vacuum Ejector Series ZA

KJS04-M5 KJS06-M5 KJL04-M5 KJL06-M5 M-5P Without fitting (M5 x 0.8) 4 (Straight) 6 (Straight) 4 (Elbow) 6 (Elbow) With plug Manifold model Ejector nozzle diameter ZH 0.5 0.7 -2P (KJ04-M5 one side) -5P (KJL04-M5 one side) Stations ZZA1 4 stations 2 stations ZU -22 (KJ04-M5 both sides) -55 (KJL04-M5 both sides) Stations ZZA1 8 stations 4 stations ZL -3P (KJS06-M5 one side) -6P (KJL06-M5 one

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-11-1 for further information on auto switches.

Series MXP Precision Air Slide Table

M Stroke:S MXP16-20 Piping port A Width across flats 3 Width across flats 8 2-M50.8 17 H (Plug:M-5P) 11 M61 26.7 10.5 5.5 46 35 34 8.5 4-M61 4-M50.8 Bottom hole diameter 5.1 7 deep 30 19 6.5 A W 320.05 0.50.05 8 D B Piping port 2-M50.8 47 13 J Mounting base side B D 16.5 14.5 Across AA MXP16-30 Without magnet and switch rail 2-M20.4, 3 deep For magnet mounting 2-M30.5, 3.5 deep 8 For rail

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

-M9NL u Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage (Pam3/s or less) Note 1) Symbol Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM

IZ-OMK0015

And Adjust the offset voltage after supplying power. 23 Doc.No.IZ-OMK0015D (11) Timing chart Timing chart of normal operation Normal operation Reset operation Remarks Turn the power off to solve the problem, then supply power again. The error signal(OUT3) will be reset.

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Specification: Clean Series, Vacuum Type, Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: Axial Piping Type, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

NCQ8

L M9NL 197in (5 m) .

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Weight: 12 g KM KF Bushing: M-5B Plug: M-5P M M Width across flats 10 M5 x 0.8 Width across flats 7 H/DL L/LL M5 x 0.8 10.1 KC R 1 8 Weight: 5.8 g Weight: 1.3 g KK Precautions KK130 DM Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions.

2

) Note 11) Note 11) Note 11) Note 11) Note 11) 6C Nylon bowl with bowl guard Note 12) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

1

Standard type 8 to 16 XA0/1/10/11 CJ2 CJ2 C85W Standard type Single acting (Spring return/extend) XA0/1/10/11 Double acting, Double rod 8 to 16 XA0/1/10/11 CJ2W Available with air cushion Double acting, Double rod XA0/1/10/11 Double acting, Single rod 8 to 16 XA0/1/10/11 CM2 C85K Non-rotating rod type Double acting, Single rod XA0/1/10/11 Single acting(Spring return/extended) 8 to 16 XA0

KJ

11 !2 !33 !4 !5 !

Base Mounted Metal Seal/Rubber Seal Series VQ

SOL.A () () (+) (+) 15 13 6 stations SOL.B SOL.A () () (+) (+) 11 9 7 stations SOL.B Connector terminal no.

MGP

B + Stroke A + Stroke E MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 59.5 37.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 12.5 112 120 148 162 24 27 32 39 M8 x 1.25 20 20 22 22 M8 x 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc

KR

(mm) A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

MG

Make a model selection, considering a load according to the graph on page 8-19-11.

MGP

(Plug) PA+stroke S G FA FB C+stroke B+stroke A+stroke E MGPM, MGPL/Common Dimensions Standard stroke (mm) Bore (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 59.5 37.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 12.5 112 120 148 162 24 27 32 39 M8 X 1.25 20 20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50 34