Specification: Clean Series, Vacuum Type, Bore Size: 4.5 mm, Symmetric Type: Symmetric, Stroke: 5mm, Adjuster: Metal Stopper Retraction End, Function: Axial Piping Type, Switch Rail: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 5mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 5mm, Adjuster: CS (Metal Stopper Extension End), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: CS (Metal Stopper Extension End), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: CT (Metal Stopper Retraction End), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: Symmetric, Stroke: 10mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: Symmetric, Stroke: 5mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: Symmetric, Stroke: 5mm, Adjuster: Metal Stopper Extension End, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: Symmetric, Stroke: 10mm, Adjuster: Metal Stopper Extension End, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: Symmetric, Stroke: 10mm, Adjuster: Metal Stopper Retraction End, Function: Axial Piping Type, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

Table of Contents

0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Table of Contents

Refer to page 8-11-96.

Compact Hydraulic Cylinder

6.5 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 CH2F (mm) Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9m/M9mV D-M9mW/M9mWV D-M9mAL/M9mAVL D-F5m/J5m/F59F D-F5mW/J59W D-F5BAL/F5NTL D-G5m

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Table of Contents

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

Table of Contents

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.