CL

11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5 13.5 13.5 19 19 19 40 45 50 65 75 85 100 106 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) LS LT LX LY MM N S W X YA P YB H ZZ e f h ZZ 13 13 16 16 17 20 30 25 l 1

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) Width across flats B1 H1 2 x NN MM MM NA 2 x Eh8 20, 25 D D Standard port Width across flats KA 45 45 1.5 A AL K Relief port (10-, 21-) H + Stroke A AL K 1.5 Vacuum port (11-, 22-) ZZ + 2 x Stroke S + Stroke F H F (mm) Female Rod End Female rod end 2 x M5 x 0.8 Relief port (10-) Vacuum port (11-) A1 20 20 20 21 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x

V100

Ground 4-7-11 12 Series VT317 How to Use DIN Terminal 1.

Table of Contents

Frequency (Hz) 45 40 55 50 65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.

ZP

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

ZP

-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

ISO Cylinder

45 + 45 (n 2) (n = 2, 4, 6) 10 15 45 45 + 15 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 Band mounting Band mounting (n 2) 2 15 + 40 D-C7l D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6) D-C7l D-C80 10 15 50 50 + 20 (n 2) (n = 2, 4, 6) (n = 2, 4, 6) (n = 2, 4, 6) D-H7l D-H7lW D-H7BA D-H7NF D-H7l D-H7lW D-H7BA D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2

CM2

SCM220A, #11, #8 SCM220A, #11, #8, #19 CM2U25SCM225A, #11 SCM225A, #11, #8 SCM225A, #11, #8, #19 CM2U32SCM232A, #11 SCM232A, #11, #8 SCM232A, #11, #8, #19 CM2U40SCM240A, #11 SCM240A, #11, #8 SCM240A, #11, #8, #19 1.4-45 Standard: Single Acting Spring Return/Extend Series CM2 Rear Trunnion (T) CM2T Bore size Stroke S T CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 CS1 (mm) B1 N Bore K NA NN E B2 D I

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Table of Contents

0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5

Table of Contents

Material Description AXT335-1-11(M4 x 40) VF4000-20-1 VFR41 VF4000-20-1 VFR42 AXT335-1-11(M4 x 40) VF4000-20-1 VFR43/44/45 NBR Hexagon socket head screw Gasket o AXT335-1-11(M4 x 40) Refer to How to Order Pilot Valve Assembly on page 3-5-54. Refer to How to Order Sub-plate Assembly on page 3-5-55. Steel !0 !

Electric Actuator/Slider Type

occurred in a test ranging between 45 to 2000 Hz.

CM2

8 13 10 10 9 22 62 30 30 9 14 19.5 17 6 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 137 146 1/8 26 0 0.033 32 45 8 13 12 10 9 22 64 30 30 9 14 19.5 17 6 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 139 148 1/8 26 0 0.039 40 50 11 16 14 15 10 24 88 38 39 11 18 21 22 8 46.5 7 M14 x 1.5 21.5 42.5 M32 x 2 177 188 1/4 32 With Rod Boot l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151

Table of Contents

P . 13-11-65 to 13-11-68 13-11-44 45 Series ZPY Vacuum Pad: Lateral Vacuum Entry with Barb Fitting without Buffer Model Pad form Mounting Female thread Male thread Vacuum entry port (Barb fitting) Pad dia.

Table of Contents

S page 11-3-4.

Battery-less

Dimensions [mm] Dimensions [mm] Model G H LEFS25E-50 100 30 LEFS25E-100 100 45 LEFS25E-150 100 45 LEFS25E-200 220 45 LEFS25E-250 220 45 LEFS25E-300 340 45 LEFS25E-350 340 45 LEFS25E-400 340 45 Model G H LEFS25E-450 460 45 LEFS25E-500 460 45 LEFS25E-550 580 45 LEFS25E-600 580 45 LEFS25E-650 580 45 LEFS25E-700 700 45 LEFS25E-750 700 45 LEFS25E-800 820 45 38 LEFS Series Battery-less Absolute

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S page 11-3-4.

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S page 11-3-4.

Electric Actuators

SET-ON 10 Start readiness signal CN2 24VDC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.