CA2

Local Area: (800) 258-9200-www.stevenengineering.com Ht Ht Bore size (mm) Hs Ht Hs Ht Hs Ht 40 33 42.5 30 30 30 30 50 37.5 46.5 34 34 34 34 B 32 A 63 43 52 41 41 41 41 80 51.5 58.5 49 49.5 49 49.5 100 58.5 66 55.5 57.5 55.5 56.5 Operating Range Bore size 63 9.5 Auto switch model 40 8.5 50 7.5 80 9.5 100 10.5 D-Z7/Z80 D-A3/A44/A3C/A44C D-A5/A6 D-B5/B64 9 10 11 11 11 D-A59W D-B59W D-Y59/

Table of Contents

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5

Air Cylinder Series MB

Bore size (mm) Z Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

CL

30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 12 12 15 18 18 14 20 20 15 17 17 21 21 16 16 22 27 27 32 41 100 110 130 160 180 230 255 275 8 11 11 13 16 71 81 101 119 133 145 160 180 80 90 105 130 150 190 212 236 59 67 73 77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 60 70 86 102 116 15 17 17 21 21 16 16 11 11 11 11 11 16 16 40

Mechanically Jointed Rodless Cylinder Series MY1

128 RB2725 9 115 30 11 99 25 40 20 66 18.5 MY1M63 8 13 (Max. 38) 152 RB2725 9.5 35 11 99 25 52 26 77 19 138.5 992 Series MY1M Mechanically Jointed Rodless Cylinder Slide Bearing Guide Type Side Support Side support A MY-SA 2 x G MY1B 2 x H F E A B C D MY1M MY1C Side support B MY-SB MY1H MY1HT 2 x J MY1W MY2C E C D A B MY2H MY3A MY3B B 71.6 79.6 95 118 142 164 202 C 15 25 35 45 D 26 38 50

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-X7 Heat resistance 100C Both sides angle adjustable One side angle adjustable, One side with cushion -X10 -X11 Fluoro rubber for seals -X16 11-7-1 2 Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 How to Order Mounting style B L Basic style Foot style Rotating angle 90 180 Rod end shape 90 180 Double shaft CRA1 B W 30 90 Size 30 CRA1 B S 50 90 Size 50 to 100 Mounting

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Keyway dimensions b l AU Model Port size Rc D (g6) DD (h9) W BA BB SA SC SU SB SD BU SE CU F DU H EU J K MU S U A B C M8 x 1.25 depth 8 156 (189) 0 0.030 62 98 17 17 8.5 13.5 45 M16 x 1.5 48 33 12 15 25 5 25 46 14 11 34 9 15 2.5 14 36 12 5 1/8 CDRA1BSU50 175 (213.5) 199 (243) 259 (325) M10 x 1.5 depth 12 0 0.030 6 76 117 19.5 20 10 14.5 54.5 M20 x 1.5 60 33 12 19 30 30 57 21 13 34 11

Table of Contents

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

Combination Cylinder

11 14 17 17 30 24 26 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M30 X 1.5 M30 X 1.5 M36 X 1.5 27 30 31 37 40 35 35 39 84 90 98 116 126 98 98 106 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 22 19 22 8 0 0 0 0 3.1-58 Lock-up

SY

B B 34 77 30 17 35 A A A Manual override 15 77.5 SS5Y3-45-D .

NCG/CG1

30 31 35.5 43 43 D-C73C, D-C80C D-B5, D-B6 D-B59W Bore size (mm) B 28.5 28.5 29.5 32.5 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 A 30 30 31 35.5 43 43 B 28.5 28.5 29.5 32.5 40.5 40.5 B 22.5 22.5 23.5 26.5 34.5 34.5 B 25.5 25.5 26.5 29.5 37.5 37.5 Hs 27 29.5 33 37.5 43 50 A Hs 27 30 33.5 38 43.5 50.5 A 27 27 28 32.5 40 40 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 24 24 25 29.5 37 37 D-H7

ZP

(7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) (8.5) 15 (8) 16 (17) (16) ZPT25 ZPT32 28 (26) 30 (25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Air Cylinder

Flange: CG1WFl F FT 4 x FD FX0.15 B E 0 0.05 B FX0.15 H (mm) Bore size Stroke range B E F FX FD FT H 20 Up to 1500 40 12 2 28 5.5 6 35 25 Up to 1500 44 14 2 32 5.5 7 40 32 Up to 1500 53 18 2 38 6.6 7 40 40 Up to 1500 61 25 2 46 6.6 8 50 50 Up to 1500 76 30 2 58 9 9 58 63 Up to 1500 92 32 2 70 11 9 58 80 Up to 1500 104 40 3 82 11 11 71 100 Up to 1500 128 50 3 100 14 14 71 * End boss is machined

Table of Contents

D AMR ITV C L IC OUT IN G VBA Pressure gauge (Option) VE B Pressure gauge port VY1 M G N Bracket (Option) Q PPA AL K P F E J (mm) Standard specifications Accessory specifications With pressure gauge Bracket mounting size Panel mount Model Port size A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30

Dual Rod Cylinder Series CXSJ/CXS

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

ISO Cylinder

10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11