XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Plug-inmManifold for VQ1*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MANIFOLD ASSY, 10-STA, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 2.83514 lb

Plug-inmManifold for VQ1*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MANIFOLD, 10-STA, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 2.04714 lb

Clean Series: 10 (Clean Room), Stations: 10, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FS1 (w/1.5 m Cable, Side Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 04, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: Clean Room, Stations: 10, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/1.5 m Cable, Side Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 04, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/1.5 m Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 04, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: 10 (Clean Room), Stations: 04, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

2

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

VQZ1000/2000/3000

part number consists of 10 units.