Stations: 8 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: None, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust, CE Compliant: -

Stations: 8 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: None, Option 2: None, Option 3: None, Option 4: External Pilot, Option 5: -, CE Compliant: -

Stations: 8 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: None, Option 2: None, Option 3: None, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust, CE Compliant: -

Stations: 8 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: Back Pressure Check Valve for All Stations, Option 2: DIN Rail Mounting, Option 3: -, Option 4: -, Option 5: -, CE Compliant: -

Stations: 8 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: None, Option 2: None, Option 3: None, Option 4: None, Option 5: None, CE Compliant: CE Compliant

Stations: 8 Stations, Port Size: ø4 One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: Upper, Cable Length: w/o Cable 25 Pin, Option 1: Back Pressure Check Valve for All Stations, Option 2: DIN Rail Mounting, Option 3: None, Option 4: None, Option 5: Built-in Silencer, Direct Exhaust, CE Compliant: -

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Metal Seal/Rubber Seal Series VQ Body Ported

When both options are specified, indicate as DN.

EX120/121/122

1 10 Connector for unit (Plug) o !

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 10 or less 25 or less 30 or less 25 or less 30 or less 30 or less 18 or less 20 or less 10 or less 12 or less 28 or less 30 or less 28 or less 30 or less 28 or less 30 or less 21 or less 33 or less 10 or less 15 or less 33 or less 35 or less 33 or less 35 or less 33 or less 35 or less 12 or less 12 or less 10 or less 10 or less 20 or less 25 or less 20 or less 25 or less 25 or less

XMD/XYD Series

14 45 80 160 200 Conductance l/s Note 1) Initial pumping 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange

XMA/XYA Series

l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMA KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main

2

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

VQZ1000/2000/3000

part number consists of 10 units.

Series VQ Metal Seal/Rubber Seal Body Ported

Note) Types with 10, 16, or 20 pins are also available. See p.1.10-67 for details.