Stations: 8 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate)

Stations: 8 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 8 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

Plug-inmManifold for VQ1*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MANIFOLD ASSY, 10-STA, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 2.83514 lb

Plug-inmManifold for VQ1*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MANIFOLD, 10-STA, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 2.04714 lb

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Clean Series: 10 (Clean Room), Stations: 10, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 12, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FS1 (w/1.5 m Cable, Side Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 04, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: Clean Room, Stations: 10, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 12, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/1.5 m Cable, Side Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 04, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/1.5 m Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 04, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: 10 (Clean Room), Stations: 04, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)