5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 10 or less 25 or less 30 or less 25 or less 30 or less 30 or less 18 or less 20 or less 10 or less 12 or less 28 or less 30 or less 28 or less 30 or less 28 or less 30 or less 21 or less 33 or less 10 or less 15 or less 33 or less 35 or less 33 or less 35 or less 33 or less 35 or less 12 or less 12 or less 10 or less 10 or less 20 or less 25 or less 20 or less 25 or less 25 or less

XMD/XYD Series

14 45 80 160 200 Conductance l/s Note 1) Initial pumping 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange

XMA/XYA Series

l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMA KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main

2

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

VQZ1000/2000/3000

part number consists of 10 units.

Series VQ Metal Seal/Rubber Seal Body Ported

Note) Types with 10, 16, or 20 pins are also available. See p.1.10-67 for details.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

When both options are specified, indicate as DN.

Clean Series: 10 (Clean Room), Stations: 10, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 12, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FS1 (w/1.5 m Cable, Side Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 04, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: 10 (Clean Room), Stations: 08, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU0 (w/o Cable, Top Entry), Option: DN (DIN Rail Mount Style, w/Name Plate)

Clean Series: Clean Room, Stations: 10, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 12, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/1.5 m Cable, Side Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 04, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/1.5 m Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø4, Kit: w/o Cable, Top Entry, Option: DIN Rail Mount Style, w/Name Plate

XMC/XYC Series

Conductance l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMC KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW