Serial Transmission System Series EX250 Series EX500

fitting 10 One-touch fitting 12 One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Ports 2, 4 mixed 8 One-touch fitting N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting 5/16" One-touch

HRX-OM-X084

Fig 9-5 Cooling capacity (HRR010-A -10-) 9.4.2 HRR010-W-102000 2000 50Hz 60Hz 25 1500 1500 25 Cooling capacity[W] Cooling capacity[W] 32 32 35 35 1000 1000 500 500 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] The cooling capacity will be reduced by 300W when option: T1 is selected.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

4/5 Port Air Operated Valve Series SYJA3000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

4/5 Port Air Operated Valve SYJA3000 Series

B M3 x 0.5 (Piping port) 1.5 1.5 33 36 Manual override B P R R (35) 7 7 36 (2) 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2 x M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2 x 3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2 x 1.8 2 x M3 x

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

VK300

(P, R port) 2 x 4.5 (Mounting hole) 39 23 8 (Pitch) 1.5 10.5 49.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) (Pitch) n x Rc 1/8 (A port) L Dimension n L n: Stations 1 37 27 20 398 388 13 32 51 70 89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 56 46 3 75 65 4 94 84 5 113 103 6 132 122 7 151 141 8 170 160 9 189 179 10 208 198 11 227 217 12 246 236

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 4-5-9 10 Series VK300 Precautions Be sure to read before handling.

ARM10/11

IN/OUT fitting type 7 stations Metric size Inch size 8 stations 9 stations IN side IN side Straight Straight Elbow OUT side Straight Elbow Straight Elbow OUT side 10 stations Elbow Note) Symbol Symbol 4 6 4 6 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 5.

ARM10/11

IN/OUT fitting type 7 stations Metric size Inch size 8 stations 9 stations IN side IN side Straight Straight Elbow OUT side Straight Elbow Straight Elbow OUT side 10 stations Elbow Note) Symbol Symbol 4 6 4 6 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 5.

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

Plug-in Unit

Port size VQC1000/2000 VQC4000 --C8 Port size VQC2000 VQC1000 Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B C0 VVQC 1 000-2A-1 For 3.2 One-touch fitting For 4 One-touch fitting For 6 For 8 For 10 For 12 For 1/8" For 5/32" For 1/4" For 5/16" For 3/8" For M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported Without One-touch fitting Option Series Nil R Centralized exhaust External pilot

VK3000

Mounting hole ( ) 63.4 50.4 VQD-V (Bleathing hole) 24 21 VK VK 2.3 68.1 VT 3R2 5R1 1P Refer to grommet type for other dimensions. 2 x M5 x 0.8 (R1, R2 port) 1423 VK3000 Series Dimensions: Base Mounted Grommet: VK3140-G-01 DIN terminal: VK3140-D-01 2 x 4.3 (Mounting hole) 32 4 B A 26 23 74.1 Max.10 2 x 4.3 (Mounting hole) Applicable cable O.D.: 3.5 to 7 Manual override (Non-locking) Pg7 ~

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

R port VP Rc(PT)1/8 P port Foot bracket PE port P 1 3 R VQ 14.5 11 2-2.2 Die cast hole For manifold gasket positioning VQZ VZ VS DIN terminal (Y): VQZ2l2(R)-lYl-C4, C6, M5 L plug connector (L): VQZ2l2(R)-lLl-C4, C6, M5 Indicator light 300 83 84 (Lead wire) 32 35.5 87 MAX.10 Cover diameter 1.5 Cross section 0.23mm2 Applicable cord O.D.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 Color: White 3.2 4 6 8 10 D VP VG VP DIN rail AXT100-DRS070 L As for , enter the number from the DIN rail dimensions table.