For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 389 759 352 722 315 685 278 648 L1 L2 L3 L4 L5 241 611 204 574 167 537 130 500 93 463 56 426 379 749 342 712 305 675 268 638 231 601 194 564 157 527 120 490 83 453 46 416 412.5 775 375 737.5 337.5 700 300 662.5 261.5 625 225 587.5 187.5 562.5 150 525 112.5 487.5 75 450 423 785.5 385.5 748 348 710.5 310.5 673 273 635.5 235.5 598 198

5 Port Air Operated Valve Series VFA3000 1

VV5FA5-20-051 1 pc. VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

VFA3000

10 7.5 10{8.7} 6.1 7.3 7.3 6.3 8.1{7.4} 5.6 8.9 8.9 7.1 14{8.3} 5.7 12 12 7.4 13{8.9} 6.1 2.2 2.2 1.8 0.33 0.34 0.43 0.43 0.43 0.33 0.34 0.43 0.43 0.43 0.51 0.52 0.66 0.66 0.66 0.51 0.52 0.66 0.66 0.66 0.56 0.57 0.71 0.71 0.71 VFA5120-02 2 1 4 3 VFA54 20-02-X1 5 0.45{0.47} 0.37 0.49 0.49 0.38 2.2{2.1} 1.4 2.9 2.9 1.9 Base mounted (1) Body ported 0.51{0.50} 0.44 0.44 0.43 0.40 2.0{0.78} 2.4

SY

SS5Y5 20 Top ported (type 20) SS5Y5 Side ported (type 41, 42) Base type Stations A/B port size 01 Rc 1/8 Type 41 02 2 stations 41 Type 41 02 Rc 1/4 Type 42 42 Type 42 ... ... 20 20 stations C6 6 One-touch fitting Type 41, 42 C8 8 One-touch fitting Type 41, 42 2 Valve Type Note) SY320-is for type 20 manifolds. SY340is for type 41 and 42 manifolds. SY340Ris for type 42 manifolds.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 20 Type Manifold Specifications for 20 Type Port size Flow characteristics SS5Y5-20 52-SY520 SS5Y7-20 Model 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model 52-SY720 4,2 Applicable valve (A,B) c[dm3/(sbar)] c[dm3/(sbar)] Cv b b Cv (P,EA,EB) Single base / B mounting Manifold style SS5Y5-20 1/4 C8 1.90 0.28 0.53 0.20 0.48 2.20 1 (SUP) / 3/5 (EXH) Common SUP / Common

Fieldbus System

V, 1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Stations L1 L2 L3 L4 2 135.5 125 105 15 3 4 5 6 7 8 9 10 160.5 150 137 11.5 185.5 175 153 16 210.5 200 185 12.5 235.5 225 201 17 260.5 250 233 13.5 148 137.5 121 13.5 198 187.5 169 14.5 248 237.5 217 15.5 Stations SS5Y5-45GDBC4 C6 C8 Stations L1 L2 L3 L4 2 148 137.5 123 12.5 3 4 5 6 7 8 9 10 185.5 175 155 15 210.5 200 187 11.5 235.5 225 203 16 260.5 250 235 12.5 285.5 275 251 17 198 187.5

Series: 5 (VFA5000), Manifold: 20 (P.R Port Size 3/8), Stations: 10, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Piping: 20 (Body Ported), Stations: 10 Stations, A, B Port: 00N (NPT)

Piping: 20 (Body Ported), Stations: 10 Stations, A, B Port: 00N (NPT), Bracket: F (Bracket)

Piping: 20 (Body Ported), Stations: 10 Stations, A, B Port: 00N (NPT)

Model: 52 (Top Ported), Connector Type: PG (Flat Ribbon Cable, 20 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: S (All Single Wiring), Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), Thread: 00N (NPT)

Model: 52 (Top Ported), Connector Type: PG (Flat Ribbon Cable, 20 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: S (All Single Wiring), Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), Thread: 00N (NPT), Mounting: D (DIN Rail Mounting w/DIN Rail)

Manifold Type: 20 (Body Ported), Valve Stations: 10 Stations, A, B Port: 00N (NPT)

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 10 Stations Top Ported/Valve, Port Size: None, Thread: 00N (NPT)

Manifold Type: 20 (Body Ported), Valve Stations: 10 Stations, A, B Port: 00N (NPT)

Type: 20 (Common SUP/Common EXH), Stations: 10, Bracket: F (w/Bracket, Not Mounted), Thread: 00N (NPT)

Passage: 20 (Common SUP,Common EXH), Stations: 10 Stations, Thread: 00N (NPT)

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 10 Stations, A B Port Size: 00N (NPT)