Free Mount Cylinder for Vacuum Series ZCUK

(mm) 2 4 6 8 10 13 16 20 25 32 40 50 Bore size Bore size (mm) 2 4 6 8 10 13 16 20 25 32 40 50 Model Note 1) 10 16 20 25 32 10 ZCUKC ZCUKQ ZCDUKC ZCDUKQ M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 ZCUKD ZCUKR ZCDUKD ZCDUKR 16 20 25 32 U R Note) When using ZC(D)UK 10, use ZP02 to 08U-X11. Pad shape is flat only.

5 Port Solenoid Valve Series SV

Characteristics Port size Flow characteristics 14, 2(PA, B) 4, 25, 3(A, BEA, EB) Model 4, 2 (A, B) 1, 5, 3 (P, EA, EB) C[dm3/(sbar)] C[dm3/(sbar)] Cv Cv b b C6 SS5V1-10 C8 0.96 0.24 0.28 0.26 0.35 1.1 C8 SS5V2-10 C10 2.1 0.46 0.48 0.20 0.18 2.4 C10 SS5V3-10 C12 4.2 0.91 0.93 0.22 0.21 4.3 C12 SS5V4-10 C12 6.2 1.3 1.6 0.19 0.18 7.0 Note) Value is for manifold base with 5 stations and individually

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: EtherNet/IP, Input Block Stations: None, Input Block COM: +COM, Stations: 8 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø4 One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: -

Electric Actuator

to 500 10 LEFS16 100 to 400 10 4 5 to 250 5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (

Table of Contents

KFN-04 KFN-06 KFW-04 KFW-06 KFV-04 KFV-06 KFS-04 KFS-06 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

KJ

KFN-04 KFN-06 KFW-04 KFW-06 KFV-04 KFV-06 KFS-04 KFS-06 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

ZP

10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.

KF

KFN-04 KFN-06 KFW-04 KFW-06 KFV-04 KFV-06 KFS-04 KFS-06 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 20 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: R (External Pilot), A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 10 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 13 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 9 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 12 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Type: Base for Manifolds, Communication Protocol: EtherNet / IP Compatible, Output Format: PNP Sensor Input, Type: EX250 Compatible Tie-Rod Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: DIN rail mounting (without DIN rail), Port pipe connection port diameter: ø4 single-action pipe fitting (A-, B-Port) / ø8 single-action pipe fitting (P-, E-Port