VQ7-6/7-8

Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R

VQ7-6/7-8

seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

. 10 stations 1 . . .

Digital Flow Switch (Remote type monitor unit)

to 186 1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

VS7-6

6, 8, 10 Piping SYJ F.

Ejector Valve Unit, Series ZYY/ZYX

10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow

Series: 2 (10-SV2000), Enclosure: W10CD, Valve Stations: 12 Stations, P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)

Series: 4 (10-SV4000), Enclosure: W10CD, Valve Stations: 12 Stations, P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: N11 (One-touch Fitting for Ø3/8)

Series: 1 (10-SV1000), Enclosure: W10CD, Valve Stations: 08 (8 Stations), P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)

Series: 1 (10-SV1000), Enclosure: W10CD, Valve Stations: 06 (6 Stations), P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)

Series: 3 (10-SV3000), Enclosure: W10CD, Valve Stations: 07 (7 Stations), P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: N11 (One-touch Fitting for Ø3/8)

Series: 2 (10-SV2000), Enclosure: W10CD, Valve Stations: 05 (5 Stations), P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6), Mounting: D (DIN Rail Mounting w/DIN Rail)

Series: 10-SV2000, Enclosure: W10CD, Valve Stations: 4 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø1/4, Mounting: -

Series: 10-SV2000, Enclosure: W10CD, Valve Stations: 8 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø1/4, Mounting: -

Series: 10-SV2000, Enclosure: W10CD, Valve Stations: 12 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø6, Mounting: -

Series: 10-SV4000, Enclosure: W10CD, Valve Stations: 12 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø3/8, Mounting: -

Series: 10-SV1000, Enclosure: W10CD, Valve Stations: 8 Stations, P, E Port Locations: Both Sides, 2-20 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø6, Mounting: -