NCQ8

10 10 250 200 150 106 075 056 250 200 150 106 075 056 250 200 150 106 1 1 1 075 056 0.1 0.1 0.1 0.01 0.01 0.01 0 0.5 1 1.5 2 2.5 3 3.5 4 0 0.5 1 1.5 2 2.5 3 3.5 4 0 0.5 1 1.5 2 2.5 3 3.5 4 Cylinder stroke (inch) Cylinder stroke (inch) Cylinder stroke (inch) W (Mounting orientation: Horizontal) 4 Series NCQ8 Compact Cylinder Double Acting, Single Rod Mounting Bolt Mounting method: Mounting

NCM

(in) 1 1 2.00 10 10 1.50 1.00 1.25 0.1 0.1 0.50 0.37 0.33 0.27 0.25 0.179 0.16 0.13 0.12 0.08 1.06 0.88 0.75 0.01 0.01 0.56 1 1 0.44 0.001 0.001 400 300 0.1 0.1 200 20 100 15 80 10 60 40 5 20 10 2 25 25 150 100 150 50 100 50 75 75 125 125 Operating pressure (PSI) Operating pressure (PSI) The piping length is the length of the steel pipe or tube that connects the cylinder with the switching

CATALOG VC10

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

TABLE OF CONTENTS

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

Electric Actuator/Slider Type

Model L A B n D E LEFS40 -150 403.4 156 328 4 150 LEFS40 -200 453.4 206 378 6 2 300 LEFS40 -250 503.4 256 428 6 2 300 LEFS40 -300 553.4 306 478 6 2 300 LEFS40 -350 603.4 356 528 8 3 450 LEFS40 -400 653.4 406 578 8 3 450 LEFS40 -450 703.4 456 628 8 3 450 LEFS40 -500 753.4 506 678 10 4 600 LEFS40 -550 803.4 556 728 10 4 600 LEFS40 -600 853.4 606 778 10 4 600 LEFS40 -650 903.4 656 828 12 5

AC Servo Motor Driver (Pulse input type/Positioning type ）

[degree] speed [r/min] [ms] [ms] 1 120.000 1000 100 150 100 1 05 2 -320 .000 500 150 100 200 1 10 3 -230.000 3000 200 300 150 3 15 4 70.000 1500 300 100 Disabled 0 (Note) 20 Note.

Made to Order

, 200 120 12 16 10 100 35 9 35 135 20 80 118 6.6 18 5.5 6 8 4 40 73 M6 x 1 depth 12 11 depth 8 M10 x 1.5 depth 18 M8 x 1.25 depth 16 M12 x 1.75 depth 21 140 16 19 10 120 40 9 45 170 20 100 150 9 25 6.5 9 10 7 50 93 14 depth 10 75, 100, 125 150, 200 250, 300 M8 x 1.25 depth 16 M12 x 1.75 depth 21 140 16 19 10 120 40 9 45 170 20 100 150 9 25 6.5 9 10 7 50 93 14 depth 10 M14 x 2 depth 25 M10

CJ2

10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Bore size 10 16 10 mm 16 mm CJ2 Intermediate strokes are available by the 1 mm interval with no stroke adjustment by spacer.

AC Servo Motor Driver (Network card type ）

Operations when "10" is set to the auxiliary function of point table No. 4 Acceleration Deceleration Point Position data Servo motor Dwell time Auxiliary time constant time constant function M code table No. [10STM m] speed [r/min] [ms] [ms] [ms] 1 4.00 1500.00 200 100 150 1 01 2 5.00 3000.00 100 150 100 3 05 3 10.00 2000.00 150 200 200 1 10 4 5.00 1000.00 300 100 150 10 15 Operation sequence

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

C4 C6 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 112.5 91.5 15.5 135.5 125 102 16.5 148 137.5 112.5 17.5 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 210.5 200 175.5 17.5 SS5Y3-45FUStations B-Q C4 C6 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 135.5 125 108 13.5 148 137.5 118.5 14.5 160.5 150 129 15.5 173 162.5 139.5 16.5 185.5 175 150

LJ1H

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

SY

C4 C6 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 112.5 91.5 15.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 210.5 200 175.5 17.5 148 137.5 123 12.5 148 137.5 112.5 17.5 135.5 125 102 16.5 SS5Y3-45FUStations B-C4 C6 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 135.5 125 108 13.5 148 137.5 118.5 14.5 160.5 150 129 15.5 173 162.5 139.5 16.5 185.5 175 150

Electric Slide Tables

0.25 20 to 400 8 6 2 10 to 200 5 Step motor (Servo/24 VDC) Series LECP1 50, 100 4 1 20 to 400 10 9 4 10 to 150 8 50, 100 150 Series LECPA LESH25 6 2 20 to 400 16 Page 25 2 0.5 10 to 200 4 Symmetrical type/ L type LESH8A 50, 75 1 0.25 20 to 400 8 5 2 10 to 200 5 Servo motor (24 VDC) Series LECA6 LESH16A 50, 100 2.5 1 20 to 400 10 6 2.5 10 to 150 8 50, 100 150 R L LESH25 A 4 1.5 20 to 400

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

Floating Joint

Model Order no. d: Thread nominal size d: Thread nominal size H H B C B C JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-100 JA20-8-125 JA32-10-100 JA30-10-125 JA25-10-150 JA40-12-125 JA40-12-150 JA40-12-175 JA40-14-150 JA50-16-150 JAH40-16-150 JA63-16-200 JA63-18-150 JAH50-20-150 JA80-20-250 JA80-22-150 JAH63-24-150 JAH63-24-200 JA100-24-300 JA100-26-150 JA100-27-150 JA125-27-200 JA140

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 7.6 5.1 2.6 0.6 0.1 7.6 5.1 2.6 0.6 0.1 30 30 5.1 3.4 1.7 0.4 0.1 5.1 3.4 1.7 0.4

JA/JAH/JB/JS

6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

Electric Actuator

Special cap bolt Double Clevis CD hole H10 axis d9 [mm] Stroke range (mm) A CL CD CT size 10 to 100 160.5 150.5 25 10 5 101 to 200 185.5 175.5 CU RR CW L CL + Stroke A + Stroke +0.4 +0.2 CX 10 to 100 180.5 170.5 32 10 6 0.1 0.3 CZ 101 to 200 210.5 200.5 Stroke range (mm) CW CX CZ L RR CU size 10 to 100 25 14 20 18 36 14.5 10 101 to 200 10 to 100 32 14 22 18 36 18.5 10 101 to 200 Material:

CJ2

Bore Bore B C d H 10 16 NTJ-015A 10 16 7 8 8.1 9.2 M4 X 0.7 M5 X 0.8 3.2 4 NTJ-010A Dimensions by stroke (mm) Symbol S Z ZZ Stroke Bore 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 48.5 56 68 80 84.5 92