AMX-OM-Q018E

B AR20-B AR40-B AR25-B Differential pressure gauge GD40-2-01-X29 Y30(T)-A Y30(T)-A Y20(T)-A Y40(T)-A Spacer Y40(T)-A Y20(T)-A Fluid Compressed Air Range of operating conditions Inlet air pressure MPa 0.3 to 1.0 0.3 to 0.85 0.3 to 1.0 0.3 to 0.85 Inlet air temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Ambient temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Standard Performance

LEC-OM02904

12.7 A B C D E 10120-3000PE 10320-52F0-008 22.0 33.3 14.0 10.0 12.0 AWG2430 9 4 9 (b) M2.6 [mm] E D A C F LOG 39.0 23.8 5.2 B 12.7 A B C D E F 10120-3000PE 10320-52A0-008 22.0 33.3 14.0 10.0 12.0 27.4 AWG2430 (3) SCR (3M()) 36210-0100PL 36310-3200-008 [mm] 39.5 34.8 22.4 11.0 9 5 10 10 . 2 10.1 . 2 10.2 . 3 10.3 . 5 10.3.1 . 5 10.3.2 . 6 10.4 . 7 10.5 . 7 10 1 10 10 10.1

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

Membrane Air Dryer

Standard dew point -20oC, -15oC : about 10 min.

Body Size: 40, Thread: N (NPT), Port Size: 06 (3/4), Option: BG (B + G), Semi-Standard: 1Z (1 + Z)

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 3/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: [NPT]

Special Applications: 10-AR (Clean Series), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Special Applications: 10-AR (Clean Series), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: NRYZ (N+R+Y+Z)

Special Applications: Clean Series, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Nameplate/Caution Plate for Bowl in Imperial Units

Special Applications: Clean Series, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: N+R+Y+Z

AC20-A to AC40-A

Standard Specifications AC20-A AC25-A AC30-A AC40-A AC40-06-A Model AF40-06-A AR40-06-A AL40-06-A AF40-A AR40-A AL40-A AF30-A AR30-A AL30-A AF30-A AR25-A AL30-A AF20-A AR20-A AL20-A Air filter Regulator Lubricator Component Port size Pressure gauge port size Fluid 3/4 1/8, 1/4 1/4, 3/8 1/8 1/4, 3/8 1/4, 3/8, 1/2 Air 5 to 60C (with no freezing) 1.5 MPa 1.0 MPa 0.05 to 0.7 MPa 5 m Class 1

Common Supply Regulator

Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11 8. Operation and Adjustment 12-13 9. Trouble Shooting 14-15 10. How to Replace the Components 16-21 10-1. Diaphragm Assembly Replacement 16 10-2. Valve Guide Assembly and Valve Assembly Replacement 17 10-3. Square Embedded Type Pressure Gauge Replacement 18 10-4.

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

ISO Interface

Operating Note 3) 2-position 8-6:5, 8-8:6, 8-10:5 8-6:20, 8-8:15, 8-10:10 frequency cycle/sec. 3-position 8-6:3, 8-8:3, 8-10:2 8-6:10, 8-8:10, 8-10:20 Lubrication Not Required Manual override Non-locking push type Protection structure Dust Proof Coil rated voltage 100VAC, 110VAC, 200VAC, 220VAC, 24VDC Allowable voltage range % -15~ +10% of rated voltage Coil insulation Class B or equivalent

Membrane Air Dryer

Standard dew point -20oC, -15oC : about 10 min. Selection Caution a. Do not obstruct the purge air discharge ports. Dehumidification performance will decrease or may become impossible if purge air back pressure becomes too high or purge air stops flowing. b. Provide proper filtration on the inlet side of a membrane air dryer.

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100 RoHS How to Order B S 50 90 Z CRA1 With auto switch CDRA1 B S 50 90 M9BW Z Built-in magnet Number of auto switches Air cushion Mounting B Basic type L Foot type* Nil None C* With air cushion Nil 2 pcs. S 1 pc.