Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: 1Z (1+Z)

Special Applications: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: 1+Z

AMX-OM-Q018E

B AR20-B AR40-B AR25-B Differential pressure gauge GD40-2-01-X29 Y30(T)-A Y30(T)-A Y20(T)-A Y40(T)-A Spacer Y40(T)-A Y20(T)-A Fluid Compressed Air Range of operating conditions Inlet air pressure MPa 0.3 to 1.0 0.3 to 0.85 0.3 to 1.0 0.3 to 0.85 Inlet air temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Ambient temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Standard Performance

LEC-OM02904

12.7 A B C D E 10120-3000PE 10320-52F0-008 22.0 33.3 14.0 10.0 12.0 AWG2430 9 4 9 (b) M2.6 [mm] E D A C F LOG 39.0 23.8 5.2 B 12.7 A B C D E F 10120-3000PE 10320-52A0-008 22.0 33.3 14.0 10.0 12.0 27.4 AWG2430 (3) SCR (3M()) 36210-0100PL 36310-3200-008 [mm] 39.5 34.8 22.4 11.0 9 5 10 10 . 2 10.1 . 2 10.2 . 3 10.3 . 5 10.3.1 . 5 10.3.2 . 6 10.4 . 7 10.5 . 7 10 1 10 10 10.1

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

This is a legacy product, and replaced byAR40-N04BG-Z-B, REGULATOR, MODULAR, AIRLINE EQUIPMENT, AR MASS PRO, FC, AR MASS PRO 1/2 MODULAR (PT), 1.55699 lb

This is a legacy product, and replaced byAR40-N04BG-Z-B-X425, REGULATOR, MODULAR, AIRLINE EQUIPMENT, AR MASS PRO, FC, AR MASS PRO 1/2 MODULAR (PT), 2.31000 lb, Regulator Series ARPages 346 through to 355ModelPort sizeOptionsRegulator Series ARPages 346 through to 355AR401/4, 3/8, 1/2BracketSquare embedded type pressure gauge (except the AR10)Round type pressure gauge Digital pressure

This is a legacy product, and replaced byAW40-N04BG-2Z-B-X425, FILTER REGULATOR, MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, FC, AW MASS PRO 1/2 MODULAR (NPT), 2.92899 lb

This is a legacy product, and replaced byAW40-N04BG-2Z-B-X440, FILTER REGULATOR, MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, FC, AW MASS PRO 1/2 MODULAR (NPT), 2.86600 lb

Membrane Air Dryer

Standard dew point -20oC, -15oC : about 10 min.

Body Size: 40, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 04 (1/2), Options: BG (B+G), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: w/o Backflow Function, Thread: NPT, Port Size: 1/2, Options: B+G, Set Pressure: 0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: BG (B + G), Semi-Standard: 1Z (1 + Z)

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 1/2, Flow Direction: [Right] From Left to Right, Control Side Connection Type: [NPT]

AC20-A to AC40-A

Standard Specifications AC20-A AC25-A AC30-A AC40-A AC40-06-A Model AF40-06-A AR40-06-A AL40-06-A AF40-A AR40-A AL40-A AF30-A AR30-A AL30-A AF30-A AR25-A AL30-A AF20-A AR20-A AL20-A Air filter Regulator Lubricator Component Port size Pressure gauge port size Fluid 3/4 1/8, 1/4 1/4, 3/8 1/8 1/4, 3/8 1/4, 3/8, 1/2 Air 5 to 60C (with no freezing) 1.5 MPa 1.0 MPa 0.05 to 0.7 MPa 5 m Class 1

Special Applications: 10-AR (Clean Series), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Special Applications: 10-AR (Clean Series), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: NRYZ (N+R+Y+Z)