Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male)

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Range Options: Standard, Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port Inlet; 4-Gauge Port Outlet)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: V [7 μin. (0.18 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male),

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Range Options: Standard, Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom

High Vacuum L Type Valve

(KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9

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E-P HYREG

Applicable wire Cord external diameter: 4 to 6.5 c.f. 0.5 mm2 3 core wire (JIS C 3306 equivalent) Tightening the fittings and their torque When screwing fittings into the valves, make sure to tighten them to the proper torque values given below.

Flange Size: 100, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 150°C, with 80°C at 100VAC, 100°C at 200VAC Heater, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Operating temperature: -4 ~ +140°F(-20 to 60°C); 5-size variations include tubing O.D.: ø4, ø6, ø8, ø10, ø12, ø7, ø11, ø13; Applicable fittings include: KQ, KJ, KF, KFG, and M/MS; Tubing colors include: black, white, red, blue, yellow green; Maximum operating pressure: 20°C = 0.8 MPa and 60°C = 0.4 MPa

Cooling capacity: 140W ; Temperature range setting: -15 to 60°C (5 to 60°C for water) ; Temperature distribution in bath: ±0.02°C ; Power supply requirement: single phase 100 ~ 240 VAC, 50/60Hz ; Bath fluid: Clear water or fluorinated liquid ; Standards: CE and UL

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

Cooling capacities: 1.9 kW (6500 BTU/hr, 0.54 ton), 2.9 kW (9900 BTU/hr, 0.82 ton), 5.0 kW (17060 BTU/hr, 1.42 ton) (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; R410A refrigerant; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; Communication functions: RS232C / RS485, and 2 inputs

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

Cooling capacity: 140W ; Temperature range setting: -15 to 60°C (5 to 60°C for water) ; Temperature distribution in bath: ±0.02°C ; Power supply requirement: single phase 100 ~ 240 VAC, 50/60Hz ; Bath fluid: Clear water or fluorinated liquid ; Standards: CE and UL

High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

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High vacuum angle valve; Type: manual, bellows seal; Flange size: 16 ~ 50; Heater type: H1 (80°C), H2 (100°C), H3 (120°C); Auto switches not available

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Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: