Body Size: 20, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 02 (1/4), Options: HM (H+M), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: C (w/Bowl Guard), Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi

Actuation: 1 (Single Type), Body: 5 (Base Mounted), Option: V (Vacuum), Voltage: 5 (24 VDC), Electrical Entry: MO (M Plug Connector, w/o Connector; with Light/Surge Voltage Suppressor), Port Size: M5

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Load voltage Auto switch model Indicator light Wiring (Output) Type Special function Electrical entry M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9P V V V v v 2-wire 12 V M9B V V V v v Diagnostic indication (2-color indicator) Grommet Grommet 3-wire (NPN)

Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: MO (M Plug Horizontal Connector w/o Connector), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking

Rated Flow Range: 0.5 to 4 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 0.5 to 4 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: None,

Rated Flow Range: 0.5 to 4 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: None,

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L, Temperature: °F, Bracket: None,

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C, Bracket: None, Calibration

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2", Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: Supply Valve, N.C., Rated Voltage: 3 [110 VAC (115 VAC)], Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Vacuum Pressure

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: B1 [Supply Valve (N.O.); Release Valve (N.C.)], Rated Voltage: 12 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type,

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type,

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 12 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type,