CQS

47 52 3.5 3.5 5.4 5.4 6.5 6.5 9 9 6 8 10 12 5 6 8 10 7.5 7.5 9 11 25 29 36 40 7 7 10 10 4 4 7 7 0.5 0.5 1 1 5, 10 Note) For the following bore/stroke sizes, through-hole is threaded over the entire length.

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(same side) 100 + 55 100 + 55 110 + 55 120 + 55 20 + 55 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 15 100 110 120 1 pc. 100 1 or 2 pcs. (different sides/same side) 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 130 + 55 "n" pcs.

Rotary Actuator

8 Parallel key for size 40 i e u !2 i u w !4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

JXCx-OMT0001CN

12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (c) 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (d) S 4 + B-1 5 A-1 1 + B-3 2 A-3 (8) (a) (b) (14.2) B1 A1 (17.7) 2 1 (14) (18) 6 (10.2) B6 5 A6 2 1 B1 A1 B3 A3 (d) (5.7) 15 16 (c) L (11) (30.7) 12.6 ([820m] (a) (b) LE CP * B A B-1

3 Port Solenoid Valve/

3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 6 VP500/700-X536 Dimensions Residual Pressure Release Valve (-X536) VP542(R)-5 D YZ1-03 -X536 VP542(R)-5 D YZ1-03 -M -X536 3/8" [2(A) port] Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) 31 2 x 4.2 (For mounting) Safety limit switch Made by OMRON 3.5 7

3 Port Solenoid Valve/

3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 6 VP500/700-X536 Dimensions Residual Pressure Release Valve (-X536) VP542(R)-5 D YZ1-03l-l-X536 VP542(R)-5 D YZ1-03l-Ml-X536 3/8" [2(A) port] Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) 31 2 x 4.2 (For mounting) Safety limit switch Made by OMRON 3.5

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

Series VS

PORT SIZE APPLICABLE ISO SIZE 02 1/4" 1 CODE A, B, PORT SIZE / LOCATION APPLICABLE ISO SIZE NOTES 03 3/8" 1, 2 02 1/4" SIDE ONLY 1 NO PORTS ON BOTTOM OF MANIFOLD 04 1/2" 1, 2, 3 03 3/8" SIDE ONLY 1, 2 06 3/4" 2, 3 10 1" 3 04 1/2" SIDE ONLY 1, 2, 3 02B 1/4" BOTTOM 2, 3 SIDE PORTS PLUGGED 03B 3/8" BOTTOM 1, 2 02S 1/4" SIDE 1 03S 3/8 SIDE 1, 2 BOTTOM PORTS PLUGGED HOW TO ORDER LATERAL PLUG-IN

Vacuum Unit Ejector / Vacuum Pump System

KQ2P 06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange -40No. ZK2-OM00201 8. Maintenance 8.1.

LEH_C

4 4 10 10 PNP PNP 1P 1P 6 6 20 20 AN LECPA () AP AN LECPA NPN NPN 32 8 32 8 PNP AP PNP 40 12 40 12 (m) 8 8 8 8 A A 1.5 1 1.5 1 10 10 ( B B F F 3 3 3 3 15 15 C C 5 5 5 R 20 20 R 5 ( () R R S S / P.42 7.3 <> (NPNPNP) LEHS10K3-4 NPN 6 - 4.3 3 8 2 5 1 4 7 6 1 2 3 4 5 6 7 8 ( DC24V) 7 - 5. 5.1 I/O LEC-CN5-* PLC DC24V 2) CN5 1) CN4 LE-CP-*-* () LE-CP-*S-* () CN3 CN2

Table of Contents

8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

5 Port Solenoid Valve SY Series

4 1 8 M5 38 1 2 1 2 1 4 1 8 M5 Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) DIN External Pilot (Note 2) External Pilot (Note 2) terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 Sub-plate External pilot External pilot DIN External pilot terminal M8 SY9 40 connector Note 1) All AC voltage models have built-in surge voltage suppressor.

CRBU

Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y

Compact and Lightweight

Model 6 Rc1/8 6 ZH05DA ZH07DA 1/4" NPT1/8 1/4" ZH05DA ZH07DA One-touch One-touch EXH. SUP. 8 Rc1/8 8 ZH10DA 1/4" NPT1/8 5/16" ZH10DA 8 Rc1/4 10 ZH13DA 5/16" NPT1/4 3/8" ZH13DA 8 Rc3/8 10 ZH15DA 5/16" NPT3/8 3/8" ZH15DA 10 Rc3/8 12 ZH18DA 3/8" NPT3/8 1/2" ZH18DA 10 Rc1/2 12 ZH20DA 3/8" NPT1/2 1/2" ZH20DA Screw-in Oval release button is only available with 6. VAC. Screw-in connection SUP.

Digital Flow Switches, Series PF2A, Series PF2W

1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

KA

-U02 10 13.1 13.1 3 8 KAH06-U03 17.5 11.5 16 1 8 1 4 25 21.5 20.5 15.5 KAH08-U01 KAH08-U02 11 27 14 14 8 18.5 18.0 18.0 3 8 19.5 13.5 KAH08-U03 17 33 1 8 KAH10-U01 28 23 17 1 4 3 8 22 18 17 KAH10-U02 KAH10-U03 17 10 21 29.5 29.5 24 14 1 2 KAH10-U04 22 14 28 22 16 22 1 4 3 8 30.5 25.5 24.5 19.5 KAH12-U02 KAH12-U03 19 19 12 22 46.1 46.1 1 2 KAH12-U04 24.5 16.5 22 28 Reference

H/DL/L/LL

(mm) M Effective area (mm 2) Weight (g) A L2 L1 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 23.5 19.6 10 30 DL06-01 25 17 Applicable tubing 19.6 10 23.5 DL06-02 16 19 31 14 6 9 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 Reference dimensions after R thread installation.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 31.5 35.5 39.5 34 39 43 43.5 47.5 52.5 54 57 59.5 8 10 14 8 10 14 12 14 15.3 21.1 25.5 15.8 22.3 26.7 23.5 27.9 29.4 30.8 32 36.2 6 13 19 7 14 20 14 22 29 39 41 68 D1 M 4 17 4 4 19.7 10.4 KQB2 M L1 10 L2 A 8 D1 KS KX 6 D2 18.5 10 10 21.8 12.8 10 H Connection threads 8 15.2 20.5 26 18 25.3 12 KM (R) (R) 2 x Applicable tubing 10 18.5 23 41 29

Air Cylinder CP Series Cylinder Positioner Assembly

2.2A (53J 8 . 1 1 1206) 2.O5 l52l '11.2\2 6 0 (66J 8 4 3 (?