Common: N (-COM), Connector Mounting Position: D Side, Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: R (External Pilot), A, B Port Size: C6 (ø6 One-touch Fitting)

Common: +COM, Connector Mounting Position: D Side, Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: None, A, B Port Size: N7 (1/4" One-touch Fitting)

Common: N (-COM), Connector Mounting Position: D Side, Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: None, A, B Port Size: N7 (1/4" One-touch Fitting)

Common: N (-COM), Connector Mounting Position: D Side, Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: None, A, B Port Size: N3 (5/32" One-touch Fitting)

Common: N (-COM), Connector Mounting Position: D Side, Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: None, A, B Port Size: C6 (ø6 One-touch Fitting)

Common: +COM, No.of Pins: G (20 Pin 2~16 Stations), Connector Mounting Position: D Side, Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N7 (1/4" One-touch Fitting)

Common: +COM, No.of Pins: G (20 Pin 2~16 Stations), Connector Mounting Position: U Side, Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N3 (5/32" One-touch Fitting)

Common: +COM, No.of Pins: 26 (2~20 Stations), Connector Mounting Position: D Side, Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N7 (1/4" One-touch Fitting)

SI Unit: Q (DeviceNet Omron CompoBus/D), Valve Stations: 14 Stations, Mounting Position: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N3 (5/32" One-touch Fitting)

SI Unit: Q (DeviceNet Omron CompoBus/D), Serial Interface Position: D Side, Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: N7 (1/4" One-touch Fitting)

SI Unit: Q (DeviceNet Omron CompoBus/D), Serial Interface Position: U Side, Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot Type: Standard Internal Pilot, A, B Port Size: C4 (ø4 One-touch Fitting)

Valve Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations)

Model: 10S (Side Ported), SI Unit: ZE (EtherNet/IPâ„¢, Negative Common), Input Block Stations: None, Input Block Type: w/o Input Block, Valve Stations: 14 Stations, P,E Port, SUP/EXH Assembly: B (Both Sides, 2 to 24 Stations, Internal Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch)

Model: 10 (Side Ported), Number of Cores - Lead Wire: L1 (34 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 14 Stations, P,E Port Entry: B (Both Sides, 2 to 24 Stations), SUP/EXH Block Assembly: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting, Straight, Metric), Mounting: BA (Direct Mounting, Name Plate, w/o Station Number)

Model: 10 (Side Ported), Number of Cores - Lead Wire: L1 (34 Cores), Lead Wire Length: 3 (3m), Valve Stations: 14 Stations, P,E Port Entry: B (Both Sides, 2 to 24 Stations), SUP/EXH Block Assembly: S (Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch)

Model: 10 (Side Ported), Number of Cores - Lead Wire: L1 (34 Cores), Lead Wire Length: 3 (3m), Valve Stations: 14 Stations, P,E Port Entry: B (Both Sides, 2 to 24 Stations), SUP/EXH Block Assembly: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch)

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: NPN, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEHZJ25LK2-14, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: DIN rail mounting type

Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 25, Seal Type: Bellows Seal, Sonic Conductance: 14, Valve Type: Angle type, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10<

Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 25, Seal Type: Bellows Seal, Sonic Conductance: 14, Valve Type: In-line type, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10

Transportable Mass (Horizontal)(kg): 14, Drive Method: Belts, Guide: Included, Lead(mm): 48, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Table Width W1(mm): 60, Brake: Not Provided, Noise Filters: Not Provided, Table Length L1(mm): 122, Operating Environment: Standard, Positioning Repeatability(µm): ±80, Maximum Velocity(mm/sec): 3,000, Size: 32, Motor Type