SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

High Power Cylinder:

D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-032 BMA2-040 BMA2-025 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state Reed Solid state D-B53, D-B54, D-B64, D-B59W D-G5NTL BA-32 BA-04 BA-01 BA-02 Reed Solid state D-A33, D-A34, D-A4 D-G39, D-K39 BD1-02M BD1-02 BD1-04M Precautions Be sure to read before handling.

MLGC

/C8, D-H7 MNB CNA Hs 14.5 CNS CLS CLQ MLGP RLQ Auto switch D-B5/B6, D-G5/K5 MLU ML1C DHs 14.5 -X 20Data Auto switch D-B7/B8, D-G7/K7 Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto switch model D-G5 D-K59 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7W D-H7BAL D-H7NF

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

Process Valve Series VNA

23 Q 5 D VO307 00 Q CE compliant CE compliant 5 D SF4 5 D 23 Note) Electrical entry: D or DZ only Note) Electrical entry: D or DZ only VO301 00 With surge voltage suppressor Manual override Coil rated voltage Coil rated voltage None Surge voltage suppressor (Except DZ, DL) Nil Non-locking push type Non-locking push type A (projecting) Nil 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(V), D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

MLGC

D-G5 D-K59 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W Applicable bore size (mm) A A B A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

Series MLGP

Auto switch proper mounting position (detection at stroke end) and its mounting height 20 to 100 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-Z7 Auto switch D-Z80 D-Y59 D-Y69 D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA D-Y7BA D-P3DW *Cannot be mounted on bore size 20. 25 to 63 80 , 100 D-P4DW *Cannot be mounted on bore size 25 or less.) 32 to 63 80 to 100 Less than 25 to 75 strokes * For bore sizes

3 Position Cylinder Series RZQ

D-A80 =U B + First-stage stroke =U B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-Y7NTL D-F7BAL B + First-stage stroke =U SMC =U B A D-A73C D-A80C D-J79C B + First-stage stroke =U =U B A D-A79W D-F7WV D-F7V D-F7BAVL B + First-stage stroke =U SMC =U B A 11 3 Position Cylinder Series RZQ D-A9 D-F9 D-F9W D-A9V D-F9V D-F9WV D-F9BAL B =U =U A B + First-stage stroke 50 or larger bore size D-P5DW

RZQ

37.5 27.5 38 24.5 35 26 36.5 30 40.5 29 39.5 40 CC 27 39 31 43 31.5 43.5 28.5 40.5 30 42 34 46 33 45 50 29.5 40 33.5 44 34 44.5 31 41.5 32.5 43 36.5 47 35.5 46 RB 63 33 43 37 47 37.5 47.5 34.5 44.5 36 46 40 50 39 49 J D-A7H,A80H D-F7,D-F79F D-J79,J79W D-F7W D-F7BAL D-F7NTL DD-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-M9V D-F9WV D-A7,A80 Bore size (mm) -X 20U

Modular F.R.L. Unit

Accessory Optional specifications D Float type auto drain (N.O.)

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

side D side 3 m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C8: 8 One-touch fittings Manifold base (8 stations) 10-SS5Q23-08FD2-D F kit (D-sub connector kit) 10-SS5Q23-08FD2-D 1 set (F kit 8-station manifold base) 10-SQ2131-51-C8 3 sets (2 position single) 10-SQ2231D-51-C8 3 sets (2 position double) 10-SQ2331-51-C8 1 set (3 position closed center) SSQ2000-10A-3 1

MIW/MIS

, D-F8P, D-F8B Auto Switch Specifications Grommet D-F8P D-F8N D-F8B Auto switch part no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

Digital Flow Monitor

In conditions other than horizontal installation and 0.35 MPa supply pressure, the output may not be 0 L/min. -79No.PF-OMU0007-D Dimensions -80No.PF-OMU0007-D Bracket A (Part No: ZS-46-A1) Bracket B (Part No: ZS-46-A2) -81No.PF-OMU0007-D Panel mount adapter (Part No: ZS-46-B) Panel mount adapter + Front protective cover (Part No: ZS-46-D) -82No.PF-OMU0007-D Lead wire with connector (Part

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

D-Y7P D-Y7W D-Y7BAL D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV Finger position Air gripper model Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Note 1) There is no protrusion for sections of the table with no values entered.

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

Series KDM Rectangular Multi-connector

D K 8 8 0 P 0 1 M D K 9 0 S 0 1 M D K KDM20 8 / 1 1 0 P 0 2 M D K 1 0 S 0 2 M D K 2 . 3 3 2 P 0 2 M D K 1 0 S 0 2 M D K e u l B 2 3 / 5 3 0 P 0 2 M D K 3 0 S 0 2 M D K 4 4 0 P 0 2 M D K 3 0 S 0 2 M D K 0 2 d e R 4 / 1 7 0 P 0 2 M D K 7 0 S 0 2 M D K 6 6 0 P 0 2 M D K 7 0 S 0 2 M D K 6 1 / 5 9 0 P 0 2 M D K 9 0 S 0 2 M D K 8 8 0 P 0 2 M D K 9 0 S 0 2 M D K Applicable Tube Material