3 Position Cylinder Series RZQ

47.5 43.5 50 40 42 47.5 48.5 54.5 51 54 50 56.5 REB REC Operating Range CY (mm) Bore size Auto switch model 32 40 50 63 CX D-A9 (V) 9.5 9.5 9.5 11.5 MQ D-M9 (V) D-M9W (V) D-M9A (V) L D-A7 (H) (C) D-A80 (H) (C) 6 5.5 6 6.5 RHC 12 11 10 12 RZQ D-A79W 13 14 14 16 D-F7 (V) D-J79 (C) D-F7W (V) D-F7BA (V) D-F7NTL D-F79F 6 6 6 6.5 D-X D-P4DW 5 5 5 Individual -X Since the operating range is provided

45

connector type) Manifold (c) DIN rail release button U side Position for increasing stations (a) Bolt (b) Block separation (c) DIN rail release button lever Lid D side Replacement Parts Description SX3000 Part no.

Large Bore Compact Cylinder Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

(in) Auto Switch Mounting Position (NCDMC-C, NCDME-C) (in) D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-B59W D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-B59W D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-H7LF D-G59 D-K59 D-H7LF D-G59 D-K59 Auto switch model Auto switch model B 0.40 0.44 0.65 0.64 0.69 0.96 B 0.84 0.72 0.89 0.98 0.88 1.33 A 0.98 0.91 1.13 1.36 1.26 1.71 A 0.98 0.91 1.13

CLA

ack) 0-A54, D-B54, D-A44(C), D-A34(C) 0-A67 Zener <;Siode Reed SWitch , Blue b_ ~ue a, (black) <'ad) H Surge ab$Ol'bef D-A56 D-A33(C) :R~ ~tC h ---R;~~~r-: I-) ~: ( ';' ) L 0 ' , ' : Zener diode : ,--_.

CRBU

Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except for basic type. Note 2) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

Compact Cylinder with Lock Series CLQ

D C D C D C D CLQB32-10D M5 x 65 L M6 x 80 L M10 x 100 L M5 x 55 L 65 80 100 55 CL1 -15D -15D x 70 L x 85 L x 105 L x 60 L 70 85 105 60 -20D -20D x 75 L x 90 L x 110 L x 65 L 75 90 110 65 MLGC -25D -25D x 80 L x 95 L x 115 L x 70 L 80 95 115 70 -30D -30D x 85 L x 100 L x 120 L x 75 L 85 100 120 75 10.5 CNG -35D -35D 7 12.5 17 x 90 L x 105 L x 125 L x 80 L 90 105 125 80 -40D -40D x 95 L x

Series KDM Rectangular Multi-connector

O f o r e b m u N g n i t c e n n o c s e b u t h c n I h c n I h c n I c i r t e M c i r t e M c i r t e M 8 / 1 1 0 P 0 1 M D K 1 0 S 0 1 M D K 2 . 3 3 2 P 0 1 M D K 1 0 S 0 1 M D K e u l B 2 3 / 5 3 0 P 0 1 M D K 3 0 S 0 1 M D K 4 4 0 P 0 1 M D K 3 0 S 0 1 M D K 0 1 d e R 4 / 1 7 0 P 0 1 M D K 7 0 S 0 1 M D K 6 6 0 P 0 1 M D K 7 0 S 0 1 M D K 6 1 / 5 9 0 P 0 1 M D K 9 0 S 0 1 M

/

Conduit terminal U 100.5 E J D I M A C H L B F K N.C.

Filter Regulator

AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (

SZ3000

D Side U Side C Switch specifications w How to Order Valves Nil J Without switch With switch Enter the symbols for the required specifications in the blanks below.

IIIIIII

F O F z z lbs (1 kS ) P T . 0 125 in (3 2mm) O T 0 09'1 in (2 3mrr) T T 0.216 in (5 5mm) -75 PSIG (5 Kgf/cm2) P T 0 125 in (3.2mm) O T 0 091 in (2.3mm) T T 0 216 in (5 Smm) .75 PS|G (5 A B c D E 2.',t1 :s3.5) 1.89 (48) 1.83 (46.5) 1 . 1 4 (291 0.31 {8) Millimeters in Parentheses A B c D E 1.68 1.46 t37.'

Mechanical Valves Series NVM, NVFM, NVZNI

F O F z z lbs (1 kS ) P T . 0 125 in (3 2mm) O T 0 09'1 in (2 3mrr) T T 0.216 in (5 5mm) -75 PSIG (5 Kgf/cm2) P T 0 125 in (3.2mm) O T 0 091 in (2.3mm) T T 0 216 in (5 Smm) .75 PS|G (5 A B c D E 2.',t1 :s3.5) 1.89 (48) 1.83 (46.5) 1 . 1 4 (291 0.31 {8) Millimeters in Parentheses A B c D E 1.68 1.46 t37.'

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54 24 40.5 16.5 80 83 58 85 37 64 5 27.5 125 129 89 135 56 105 44 1213 Series ZPT/ZPX How to Distinguish Different Pad Materials

Vacuum Module Series ZX

K1 A V ZX1 5 Z B D M L 15 C 0X B ZSP1 D L AMJ Applicable nozzle diameter Piping specifications Unit for replacement Nil L Grommet (0.6 m) Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector For ejector system Manifold All ports are equipped with plugs.

SYJ300/500/700

It is already built-in to the rectifier circuit. 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

VQ5000

Kit designation CU1 Note 1) C Stations Kit (connector) CU2 Note 1) 02 2 stations Direct exhaust with silencer box: D and U side exhausts Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust P65 enclosure SB SD Note 1) 12 12 stations SU Note 1) W U D U D Note) Combination of [C ] and [S ] is not possible.

RZQ

B + First-stage stroke U MK(2) RS Q G RS H A U Mounted on different side in case of a full stroke of 25 mm or less RZQ MI W S B A CEP1 CE1 CE2 [mm] Proper Mounting Position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F ML2B D-M9 D-M9V D-F9W D-F9WV D-A79W D-A9 D-A9V C J G5-S D-A7,A80 D-F9BAL D-P5DWL Bore size (mm) CV B A B A B A B A B A B A B A MVGQ 32 27

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40