Size: 25, Motor Mounting Position: R (Basic Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: J (LES8: 8mm; LES16: 10mm; LES25: 16mm), Stroke: 75mm, Motor Option: B (w/Lock), Body Option: Basic Type, Mounting: w/o Side Holder, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 5 (5m)

Size: 25, Motor Mounting Position: R (Basic Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: J (LES8: 8mm; LES16: 10mm; LES25: 16mm), Stroke: 50mm, Motor Option: B (w/Lock), Body Option: Basic Type, Mounting: w/o Side Holder, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 5 (5m)

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 900mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 300mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic

Size: 32, Motor Mounting: R (Right Side Parallel Type), Motor Type: T7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 200mm, Motor Option: B (w/Lock), Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: R (Robot Cable, Flexible Cable), Cable Length: A (10m), Controller Type: E2 [LECSN2-T EtherCAT® (Absolute

Size: 16, Motor Mounting Position: R (Basic Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: K (LES8: 4mm; LES16: 5mm; LES25: 8mm), Stroke: 30mm, Motor Option: w/o Lock, Body Option: Basic Type, Mounting: w/o Side Holder, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I

Bearing Type: L (Ball Bushing Bearing), Stroke: 600mm, Motor Option: None, Switch Rail Option: R (w/Magnet/Switch Rail), Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length, m: 3, Controller Type - LEC, JXC: CL1 (JXCL1, IO-Link), I/O Cable Length for LEC: No Cable, Controller Mounting: 7 (Screw Mounting)

Speed Controller with One-touch Fittings

2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

cylinder 12-CY3B Dimensions 12-CY3B15 to 40 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 4-MM Thread depth J Cylinder tube outer circumference: Hard chrome plated + special treatment L 0 -0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

Thread type Cylinder side R Tube side Rc Symbol Bore size Made to Order (For details, refer to page 647.)

LIQUID CANISTERS

Required Element Required Element Required Element Option Option Pick Up Tube R = Reservoirs S1 They are manufactured of clear FDA Styrene Acrylonitrile (SAN). Bodies are stress relieved for added clarity and strength. Clear bodies offer on-site examination of flow, liquid levels and contaminant levels.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

Series 10-MGF ø40, ø63, ø100 Guide Table

R.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

R.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Air Suction Filter

(Example) For 6 stations 06 How to Order (Single unit) ZFA 100 01 Bracket Air suction filter Symbol Nil L None Bracket ZFA100 1 pc. on the left R LR Body type 1 pc. on the right With both the left and right sides 100 Filtration area (mm2) Symbol L or R shows the left or right of the filter IN when viewed from front. 2110 4210 200 Port size Thread type Applicable model Symbol 02 01 Port

Compact and Lightweight

(When using the 3 port valve, seal the R port of the release valve.) Supply valve (3 port valve) + Variable throttle + Suction filter Ex. 2 Supply/Release valve (5 port valve with 3-position) + Variable throttle Ex. 5 3 port valve 5 port valve with 3-position closed center Silencer 3 port valve is used to generate and release the vacuum.

Vacuum Saving Valve

Construction Vacuum generator side Vacuum generator side u w r t No.0.8 e y For the direction of the product, refer to 4 of back page 3. Pad side q u Description Component Parts Material Surface treatment No.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Description Material Surface treatment ZX t NBR, Silicone rubber, Urethane rubber, Fluororubber, EPR u o Pad 1 ZR r e w Adapter plate 2 Aluminum ZM w Hard chrome plated Piston rod 3 Carbon steel w Spring 4 Stainless steel ZMA Buffer body 5 Aluminum Electroless nickel plated Buffer adapter 6 Brass q q q ZQ Electroless nickel plated Adapter A 7 Brass Electroless nickel plated X type adapter