Style), A, B Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: T (NPTF)
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: C4 (ø4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve)
V VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .
VCHC AS1201F, AS1211F AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 ASR ASQ Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS4201F, AS4211F AS3201F, AS3211F Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/
(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.
Series: VQ2000, IN Port Size: 01 (Rc 1/8), OUT Port Size: 01 (Rc 1/8), Option: DN (D + N)
Series: VQ2000, IN Port Size: 01 (Rc 1/8), OUT Port Size: 01 (Rc 1/8), Option: FN (F + N)
): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
Surface of panel Surface of panel OUT SMC MPa MPa MPa MPa MPa MPa K K K K K K P P P P P P C C C C C C U U U U U U O O O O O O S S S S S S L L L L L L H H H H H H to to to to to to IN 58 Bottom of panel Bottom of panel 45 1 I N 1 I N 1 I N C S M C S M C S M 1 I N 1 I N 1 I N 2 OUT 2 OUT 2 OUT C S M C S M C S M 2 OUT 2 OUT 2 OUT In case of ARG30, dimension in height can be reduced by approx
-01-06 VZM550-01-06S Toggle lever VZM550-01-08 PAT.
rate (l/min (ANR)) 1.5 3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 Flow rate (l/min (ANR)) 20 Flow rate (l/min (ANR)) 10,11 12
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push
Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: U (w/Light/Surge Voltage Suppressor, Non-polar), Manual Override
Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: D (Push-turn
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: B1 [Supply Valve (N.O.); Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: U (w/Light/Surge Voltage Suppressor, Non-polar), Manual Override: Non-locking
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: PN (1/2-14NPT Port Exhaust), Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 3 [110 VAC (115 VAC)], Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking
Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K2 (Supply Valve, N.C.), Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum
Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push