Exhaust Cleaner for Clean Rooms AMP Series

cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13

I

NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12 13

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63

Air Cylinder MGQ Series Compact Guide Cylinder

(betwen lead wire and case) 10-60'c IEC Slandad, wabniqht(JlS C@m)and oil rsistins slrucure x "L js added to lhe end when tne lead wire is 3m lonsAuto Switch Internal Circuit Auto Switch W Table D-273 49 52 49 7.5 8-5 9.5 xReter to back cols for details ol the speciication of t l 13 contact protction bo)C Compact Guide Cylinder:Series MGQ Auto Switch 2 wire system 24VDC relay, Sequence contoller

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Needle Electroless nickel plated SUS304 Brass 5 Needle guide Electroless nickel plated SUS304 Brass 6 Seat ring Electroless nickel plated SUS304 Brass 7 Lock nut Electroless nickel plated SUS304 Brass 8 U seal HNBR HNBR Brass parts are electroless nickel plated Polypropylene resin SUS304 Polypropylene resin SUS304, Brass 9 Cassette 10 Seal NBR NBR 11 Stopper SUS304 SUS304 12 Cushion NBR NBR 13

Soft Start-up Valve AV2000/3000/4000/5000

Material AV5000 AV2000 AV4000 AV3000 SF4--80 Pilot valve assembly Piston A assembly Piston B assembly Main valve assembly Check valve Piston guide assembly Needle assembly Valve spring Piston spring Check spring Needle spring C type snap ring for shaft C type snap ring for hole Seal Seal O-ring 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 POM, NBR P424204A P424404A P424504A P424304A Brass, NBR

Miniature Regulator Series ARJ310

4 r Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y seal O-ring Lock washer Bracket Pressure gauge Cassette No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Aluminum alloy Brass Brass POM Brass Brass Brass Brass Steel wire Stainless steel Steel band NBR NBR SS Steel band POM, Stainless steel !

Modular Type Filter Regulator Series AW

090AS AW30P-090AS Filter element Diaphragm assembly Bowl O-ring Bowl assembly Note 2) 4 5 6 7 AF10P-060S AR10P-150AS Note 1) AF40P-060S AR40P-150AS C4SFP-260S C4SF Note 3) AF40P-060S AR40P-150AS C4SFP-260S C4SF Note 3) AF20P-060S AR20P-150AS C2SFP-260S C2SF AF30P-060S AR30P-150AS C3SFP-260S C3SF Note 3) Weatherability NBR NBR PC C1SFP-260S C1SF Note 1) AW10 is a piston and a gasket (KSYP-13

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

Compact Cylinder High Magnetic Field Design CDQ2BP Series

@Sffi' 13 $ut'ies CDI2BP ilhl ttal||elic tiold Bs$islorc 4. Do not drop, dent, or allow excessive impact to cylinder during handling. 5, Keep at least 20mm away from each other when 2 or more cylinders with high magnetic field resistance auto 3. switch are mounted in parallel. up, although the auto switch will function.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Shock absorbers are not available with the microspeed version of the MGGM cylinder. 13 Related Products Speed Controller for Low Speed Operation The effective area of controlled flow is approximately 1/10 of the standard type. These controllers are suitable for controlling the speed of microspeed cylinders.

Single Axis Electric Actuator Series LJ1H

B A C D 13 High Rigidity Direct Acting Guide Series LJ1H20 Standard Motor Motor Output Rolled Ball Screw 100W 15mm/20mm lead Horizontal Mount How to Order Stroke LJ1H202 NC 1 F 2 Cable entry direction Top entry Cable entry direction Cable length Power supply voltage Left entry F R L T B 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 2 3 4 5 2m 3m 4m 5m Axial Right Left Top Bottom Axial entry

Single Axis Electric Actuator Serriies LJ1S Slider Guide

LJ1-7-G/Matsushita Electric Industrial Co., Ltd. 100 Driver Non-standard motor electric actuators LJ1 and LG1 75 90 5 30 (195) AC servomotor short stroke electric actuator LX How to order 13 G LJ1 05 Compatible model 1 B 1 LJ1-7-R/Mitsubishi Electric Corporation Brake G R Y Nil B Matsushita Electric Industrial Co., Ltd.

Electric Actuator Triple Axis P&P Unit

by the customer. 3) For motor details, please refer to Applicable motors on page 23. 4) When the cover needs to be removed such as in the case of belt maintenance, secure work space of 40 mm or more. 12 3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 13

Uniaxial Electric Actuator Series LJ1

LJ1H202PAP.8~13 LJ1H20 Series. LJ1H202NAP.14~19 LJ1H30 Series. LC1-1B2H LJ1H202PCLJ1H202NC.P.21 Slider Guide LJ1S Series LJ1S10 Series. P.22~27 LJ1H202SCLC1-1B2M LJ1S20 Series. P.28~33 LJ1H202PFK LJ1S30 Series. P.34~39 LJ1H202NFK Option Specifications. P.40, 41 LC1-1B2V LJ1H202PAK Motor Reference Data, Nonstandard Motors . P.42~46 Order Made Specifications.

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Branch tee LQ1B P.10 6 1 2 3 Female 4 5 P.11 6 1 2 3 Union elbow LQ1E 4 5 P.12 6 1 2 3 Union tee LQ1T 4 5 P.13 6 1 2 3 Panel mount union LQ1P 4 5 P.14 6 1 2 3 Union LQ1U 4 5 P.15 6 4 Union flange LQ1F 5 P.15 6 Note) Basic size With reducer Features

S Couplers Series KKH

Width across flats T Connection male thread Minimum bore Model D Weight g When When L1 connected connected KKH3S-01MS R1/8 33.5 20.4 20.4 6 36 18.2 14 1/8 40 37.5 KKH3S-02MS R1/4 31.5 19.5 21.1 9 34 KKH4S-01MS R1/8 54.1 50.4 46.4 48.8 22.9 6 50.1 KKH4S-02MS R1/4 54.7 51 19 45 45.4 38.9 9 48.7 25.4 1/4 KKH4S-03MS R3/8 53.7 50 43.5 52.2 40.4 11 47.2 KKH4S-04MS R1/2 22 53.4 49.7 41.7 62.5 42.7 13

Long Stroke Slide Table Series MXY

one side. 50 100 400 350 250 150 Shock absorber Metal stopper Rubber stopper 300 200 6 8 12 Scale:100% % Scale:100% S S l 100% S l 100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100% Higher allowable moments compared to MXY8/MXW8 Allowable moment (Nm) Weight Width Height (mm) Model (g) (mm) Pitch, Yaw Roll 30 25 MXY8-50 49 47 610 420 5.7 13

Compact Cylinder Series NCQ8

Style Standard stroke (inch) Standard stroke (inch) Page Page Standard type Standard type Single rod 1 012 (1/8"), 062 (5/8"), 125 (1-1/4"), 250 (2-1/2"), 050 (1/2"), 100 (1"), 200 (2"), 400 (4") 037 (3/8"), 087 (7/8"), 175 (1-3/4"), 350 (3-1/2"), 025 (1/4"), 075 (3/4"), 150 (1-1/2"), 300 (3"), 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") Double acting Double rod 13